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- Q57702677 description "article by Akihiro Matsutani et al published 10 May 2016 in Japanese Journal of Applied Physics" @default.
- Q57702677 description "im Mai 2016 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57702677 description "wetenschappelijk artikel" @default.
- Q57702677 description "наукова стаття, опублікована в травні 2016" @default.
- Q57702677 name "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
- Q57702677 name "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
- Q57702677 type Item @default.
- Q57702677 label "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
- Q57702677 label "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
- Q57702677 prefLabel "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
- Q57702677 prefLabel "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
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- Q57702677 P31 Q57702677-C8308C6A-50ED-4A56-8371-BA57824A22E7 @default.
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- Q57702677 P478 Q57702677-0C5B03F4-8EAE-4BE8-AF83-5F245A677AF6 @default.
- Q57702677 P577 Q57702677-3F845D3A-B9BB-43E4-AF49-CC0A154DD508 @default.
- Q57702677 P356 JJAP.55.06GL01 @default.
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- Q57702677 P1476 "Chlorine-based inductively coupled plasma etching of GaAs wafer using tripodal paraffinic triptycene as an etching resist mask" @default.
- Q57702677 P2093 "Akihiro Matsutani" @default.
- Q57702677 P2093 "Fumitaka Ishiwari" @default.
- Q57702677 P2093 "Masaru Nakagawa" @default.
- Q57702677 P2093 "Takanori Fukushima" @default.
- Q57702677 P2093 "Takashi Kajitani" @default.
- Q57702677 P2093 "Takuya Uehara" @default.
- Q57702677 P2093 "Yoshiaki Shoji" @default.
- Q57702677 P304 "06GL01" @default.
- Q57702677 P31 Q13442814 @default.
- Q57702677 P356 "10.7567/JJAP.55.06GL01" @default.
- Q57702677 P433 "6S1" @default.
- Q57702677 P478 "55" @default.
- Q57702677 P577 "2016-05-10T00:00:00Z" @default.