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- Q57715970 description "article scientifique publié en 2007" @default.
- Q57715970 description "wetenschappelijk artikel" @default.
- Q57715970 description "наукова стаття, опублікована в жовтні 2007" @default.
- Q57715970 name "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 name "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 type Item @default.
- Q57715970 label "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 label "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 prefLabel "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 prefLabel "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 P1433 Q57715970-5496987D-6086-4303-A1E0-5E79E184276D @default.
- Q57715970 P1476 Q57715970-EF3DEA99-0AFD-44A7-A8FE-6794F571C22F @default.
- Q57715970 P2093 Q57715970-405F0DDB-463F-4574-BDAF-01F8F49A6144 @default.
- Q57715970 P2093 Q57715970-43590DB0-20CA-42B7-8B88-882F5A8F5B76 @default.
- Q57715970 P304 Q57715970-8B5B1913-4C16-4168-A6D9-4B03891DD483 @default.
- Q57715970 P31 Q57715970-9842B488-33F9-4D75-8F2B-96CF6D627D73 @default.
- Q57715970 P356 Q57715970-E05FE595-B33B-4EF5-8B81-C427217E8DD4 @default.
- Q57715970 P433 Q57715970-36451C20-9BF0-4AB8-A75C-3125175E7793 @default.
- Q57715970 P478 Q57715970-4D50A254-CCF0-420E-880A-2E2608A6A379 @default.
- Q57715970 P50 Q57715970-C0C748B0-1C76-4224-9D7A-B02E504BC20A @default.
- Q57715970 P50 Q57715970-F7AA310B-89C1-4090-B9FE-DB12F52C3133 @default.
- Q57715970 P577 Q57715970-3A43ED2B-D87C-4C3A-A690-EF28721AC265 @default.
- Q57715970 P921 Q57715970-CE0FCA66-5189-47A2-850F-38DD1005121B @default.
- Q57715970 P356 J.VACUUM.2007.07.001 @default.
- Q57715970 P1433 Q3974653 @default.
- Q57715970 P1476 "Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD" @default.
- Q57715970 P2093 "Elisa Grimoldi" @default.
- Q57715970 P2093 "Stefano Zanini" @default.
- Q57715970 P304 "290-293" @default.
- Q57715970 P31 Q13442814 @default.
- Q57715970 P356 "10.1016/J.VACUUM.2007.07.001" @default.
- Q57715970 P433 "2" @default.
- Q57715970 P478 "82" @default.
- Q57715970 P50 Q43523510 @default.
- Q57715970 P50 Q58198892 @default.
- Q57715970 P577 "2007-10-01T00:00:00Z" @default.
- Q57715970 P921 Q1137203 @default.