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- Q57738497 description "im Dezember 2015 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57738497 description "wetenschappelijk artikel" @default.
- Q57738497 description "наукова стаття, опублікована в грудні 2015" @default.
- Q57738497 name "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
- Q57738497 name "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
- Q57738497 type Item @default.
- Q57738497 label "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
- Q57738497 label "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
- Q57738497 prefLabel "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
- Q57738497 prefLabel "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
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- Q57738497 P356 1432891715Z.0000000002208 @default.
- Q57738497 P1433 Q15764446 @default.
- Q57738497 P1476 "The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS" @default.
- Q57738497 P2093 "J. S. Yan" @default.
- Q57738497 P2093 "L. M. Zhang" @default.
- Q57738497 P2093 "M. X. Han" @default.
- Q57738497 P2093 "P. P. Zhu" @default.
- Q57738497 P2093 "Q. F. Xu" @default.
- Q57738497 P2093 "Q. Y. Sun" @default.
- Q57738497 P2093 "R. Tu" @default.
- Q57738497 P2093 "S. S. Li" @default.
- Q57738497 P2093 "S. Zhang" @default.
- Q57738497 P2093 "T. Goto" @default.
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- Q57738497 P304 "S10-403-S10-407" @default.
- Q57738497 P31 Q13442814 @default.
- Q57738497 P356 "10.1179/1432891715Z.0000000002208" @default.
- Q57738497 P433 "sup10" @default.
- Q57738497 P478 "19" @default.
- Q57738497 P577 "2015-12-14T00:00:00Z" @default.
- Q57738497 P921 Q214781 @default.