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- Q57738664 description "im Juli 2011 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57738664 description "wetenschappelijk artikel" @default.
- Q57738664 description "наукова стаття, опублікована в липні 2011" @default.
- Q57738664 name "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 name "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 type Item @default.
- Q57738664 label "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 label "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 prefLabel "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 prefLabel "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 P1433 Q57738664-5F3DF92A-412F-4E8C-BBCA-D63313D3356A @default.
- Q57738664 P1476 Q57738664-63F5AF44-B479-41CB-AA66-3C8A35EEC9D1 @default.
- Q57738664 P2093 Q57738664-15EDB57C-FB41-46B1-BF72-8E389CBD9F04 @default.
- Q57738664 P2093 Q57738664-72EA6125-7FCF-45E9-98CC-4CFDB93826BA @default.
- Q57738664 P2093 Q57738664-C81625D0-2D97-4844-A171-E551B89262CD @default.
- Q57738664 P2093 Q57738664-F2FE35E5-C23F-41D1-B0C9-2D774759B9D9 @default.
- Q57738664 P304 Q57738664-00AC0F74-1112-4D01-824A-7DD1C890E933 @default.
- Q57738664 P31 Q57738664-AC2DC4AE-7B95-4A60-9BB1-4153E001E817 @default.
- Q57738664 P356 Q57738664-7AD77416-2047-4E16-B221-6D54C74974F9 @default.
- Q57738664 P478 Q57738664-D4D50121-15E0-4C93-A3C3-815E78D3B01F @default.
- Q57738664 P577 Q57738664-54A1C044-8502-4AA4-9AE8-228D66C1AD3D @default.
- Q57738664 P356 KEM.484.172 @default.
- Q57738664 P1433 Q15763530 @default.
- Q57738664 P1476 "Effect of NH 3 Atmosphere on Preparation of Al 2 O 3 -AlN Composite Film by Laser CVD" @default.
- Q57738664 P2093 "Akihiko Ito" @default.
- Q57738664 P2093 "Rong Tu" @default.
- Q57738664 P2093 "Takashi Goto" @default.
- Q57738664 P2093 "Yu You" @default.
- Q57738664 P304 "172-176" @default.
- Q57738664 P31 Q13442814 @default.
- Q57738664 P356 "10.4028/WWW.SCIENTIFIC.NET/KEM.484.172" @default.
- Q57738664 P478 "484" @default.
- Q57738664 P577 "2011-07-01T00:00:00Z" @default.