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- Q57755225 description "article scientifique publié en 2004" @default.
- Q57755225 description "artículu científicu" @default.
- Q57755225 description "scholarly article by L. Gao et al published October 2004 in Microelectronic Engineering" @default.
- Q57755225 description "wetenschappelijk artikel" @default.
- Q57755225 description "наукова стаття, опублікована в жовтні 2004" @default.
- Q57755225 name "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 name "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 type Item @default.
- Q57755225 label "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 label "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 prefLabel "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 prefLabel "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 P1433 Q57755225-15AF1F37-424C-49DD-AB92-69EFEAACA491 @default.
- Q57755225 P1476 Q57755225-A324862B-626C-42D4-82E7-0200BA2715C8 @default.
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- Q57755225 P31 Q57755225-3705C3B1-65AC-4E1B-A92C-4418CC47C1EA @default.
- Q57755225 P356 Q57755225-AE71B107-B8B1-45D3-80C9-E788CF6DCF1C @default.
- Q57755225 P433 Q57755225-A1848DEC-547D-4E28-A8CD-BF2AB82F93AF @default.
- Q57755225 P478 Q57755225-9DDFF274-1B38-4CBC-8F1A-0591A6BABE19 @default.
- Q57755225 P577 Q57755225-B5D88CB0-75BE-43D4-9D79-429A9D38399B @default.
- Q57755225 P921 Q57755225-372ee7ea-f485-4dd3-9497-96150a75012a @default.
- Q57755225 P356 J.MEE.2004.07.020 @default.
- Q57755225 P1433 Q2615776 @default.
- Q57755225 P1476 "Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects" @default.
- Q57755225 P2093 "A. Wiltner" @default.
- Q57755225 P2093 "Ch. Linsmeier" @default.
- Q57755225 P2093 "D. Schmitt-Landsiedel" @default.
- Q57755225 P2093 "J. Gstöttner" @default.
- Q57755225 P2093 "L. Gao" @default.
- Q57755225 P2093 "M. Balden" @default.
- Q57755225 P2093 "R. Emling" @default.
- Q57755225 P2093 "W. Hansch" @default.
- Q57755225 P304 "76-81" @default.
- Q57755225 P31 Q13442814 @default.
- Q57755225 P356 "10.1016/J.MEE.2004.07.020" @default.
- Q57755225 P433 "1-4" @default.
- Q57755225 P478 "76" @default.
- Q57755225 P577 "2004-10-01T00:00:00Z" @default.
- Q57755225 P921 Q716 @default.