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- Q57827850 description "scholarly article by Z. W. Zhao et al published July 2003 in Journal of Vacuum Science & Technology A" @default.
- Q57827850 description "wetenschappelijk artikel" @default.
- Q57827850 description "наукова стаття, опублікована в липні 2003" @default.
- Q57827850 name "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
- Q57827850 name "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
- Q57827850 type Item @default.
- Q57827850 label "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
- Q57827850 label "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
- Q57827850 prefLabel "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
- Q57827850 prefLabel "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
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- Q57827850 P31 Q57827850-592378EB-D105-4854-B7C2-D37AE266BA65 @default.
- Q57827850 P356 Q57827850-959BBEAF-29C0-49A3-9B3E-92AE77D1B4F0 @default.
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- Q57827850 P577 Q57827850-EE4B730F-A6F9-45FB-B87D-C2BC036E708F @default.
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- Q57827850 P356 1.1577132 @default.
- Q57827850 P1433 Q13739484 @default.
- Q57827850 P1476 "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system" @default.
- Q57827850 P2093 "B. K. Tay" @default.
- Q57827850 P2093 "C. Y. Xiao" @default.
- Q57827850 P2093 "S. P. Lau" @default.
- Q57827850 P2093 "Z. W. Zhao" @default.
- Q57827850 P304 "906-910" @default.
- Q57827850 P31 Q13442814 @default.
- Q57827850 P356 "10.1116/1.1577132" @default.
- Q57827850 P433 "4" @default.
- Q57827850 P478 "21" @default.
- Q57827850 P50 Q51093188 @default.
- Q57827850 P577 "2003-07-01T00:00:00Z" @default.
- Q57827850 P921 Q1137203 @default.
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- Q57827850 P921 Q663 @default.