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- Q57911304 description "article scientifique publié en 2017" @default.
- Q57911304 description "im Mai 2017 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57911304 description "wetenschappelijk artikel" @default.
- Q57911304 description "наукова стаття, опублікована в травні 2017" @default.
- Q57911304 name "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
- Q57911304 name "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
- Q57911304 type Item @default.
- Q57911304 label "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
- Q57911304 label "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
- Q57911304 prefLabel "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
- Q57911304 prefLabel "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
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- Q57911304 P356 ACS.CHEMMATER.6B05437 @default.
- Q57911304 P1433 Q2422317 @default.
- Q57911304 P1476 "Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties" @default.
- Q57911304 P2093 "Alain Moussa" @default.
- Q57911304 P2093 "Alexis Franquet" @default.
- Q57911304 P2093 "Annelies Delabie" @default.
- Q57911304 P2093 "Hugo Bender" @default.
- Q57911304 P2093 "Jaap A. van den Berg" @default.
- Q57911304 P2093 "Johan Meersschaut" @default.
- Q57911304 P2093 "Johan Swerts" @default.
- Q57911304 P2093 "Kris Vanstreels" @default.
- Q57911304 P2093 "Malgorzata Jurczak" @default.
- Q57911304 P2093 "Mihaela Popovici" @default.
- Q57911304 P2093 "Pieter Lagrain" @default.
- Q57911304 P2093 "Quan Manh Phung" @default.
- Q57911304 P2093 "Sven Van Elshocht" @default.
- Q57911304 P304 "4654-4666" @default.
- Q57911304 P31 Q13442814 @default.
- Q57911304 P356 "10.1021/ACS.CHEMMATER.6B05437" @default.
- Q57911304 P433 "11" @default.
- Q57911304 P478 "29" @default.
- Q57911304 P50 Q56424345 @default.
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- Q57911304 P50 Q61804840 @default.
- Q57911304 P50 Q61805073 @default.
- Q57911304 P577 "2017-05-31T00:00:00Z" @default.
- Q57911304 P921 Q1137203 @default.