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- Q57959180 description "wetenschappelijk artikel" @default.
- Q57959180 description "наукова стаття, опублікована в лютому 2011" @default.
- Q57959180 name "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 name "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 type Item @default.
- Q57959180 label "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 label "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 prefLabel "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 prefLabel "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 P1476 Q57959180-29B98460-9050-41D0-AEEA-3D9FE4078FD9 @default.
- Q57959180 P2093 Q57959180-2AF4B228-6655-4199-AFC3-CF734C3BBBF0 @default.
- Q57959180 P2093 Q57959180-AD6C8926-9254-4891-AB5F-9044887D91E5 @default.
- Q57959180 P2093 Q57959180-B4F0C126-3F8B-4169-BEB1-92ACF5DAEFBB @default.
- Q57959180 P2093 Q57959180-B8297930-ECB5-477F-A646-BE02CE6F7DDD @default.
- Q57959180 P2093 Q57959180-F59601BE-EB77-4668-B440-7B76A2863821 @default.
- Q57959180 P2093 Q57959180-F7E00A8A-F579-461C-82FB-1CCAC6897CB1 @default.
- Q57959180 P31 Q57959180-F46127A0-CD88-4118-B5CC-371C11DCB28E @default.
- Q57959180 P356 Q57959180-139A4AF1-5593-437F-BF44-C658D3FE7842 @default.
- Q57959180 P577 Q57959180-022B7C92-16C2-4BA0-92EF-5D4CFA167E61 @default.
- Q57959180 P356 SCED.2011.5744181 @default.
- Q57959180 P1476 "Sputter optimization of AlN on diamond substrates for high frequency SAW resonators" @default.
- Q57959180 P2093 "D. Araujo" @default.
- Q57959180 P2093 "F. Calle" @default.
- Q57959180 P2093 "G. F. Iriarte" @default.
- Q57959180 P2093 "J. G. Rodriguez" @default.
- Q57959180 P2093 "M. P. Villar" @default.
- Q57959180 P2093 "O. A. Williams" @default.
- Q57959180 P31 Q13442814 @default.
- Q57959180 P356 "10.1109/SCED.2011.5744181" @default.
- Q57959180 P577 "2011-02-01T00:00:00Z" @default.