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- Q58001345 description "artículu científicu" @default.
- Q58001345 description "wetenschappelijk artikel" @default.
- Q58001345 description "наукова стаття, опублікована в жовтні 2003" @default.
- Q58001345 name "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 name "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 type Item @default.
- Q58001345 label "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 label "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 prefLabel "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 prefLabel "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 P1433 Q58001345-686E2654-13A3-4515-A22D-FD98DDADA659 @default.
- Q58001345 P1476 Q58001345-EE49D5B7-1AD0-49EB-8121-6F3CBEE8E3AE @default.
- Q58001345 P2093 Q58001345-4EE7D30F-BD05-46C9-ADA8-140626B7A3EA @default.
- Q58001345 P2093 Q58001345-931C7A3D-2013-4C6C-A482-2BFD195E9C9E @default.
- Q58001345 P304 Q58001345-F812AC20-7526-4727-A1A7-10ABD69ADAB7 @default.
- Q58001345 P31 Q58001345-1D79DB4A-3EB0-4A17-A925-CCA188130DCF @default.
- Q58001345 P356 Q58001345-07F44512-EE0D-456A-8426-D54F9CFF5E90 @default.
- Q58001345 P433 Q58001345-C08134B5-428F-46AB-87C0-57D912EB5AF2 @default.
- Q58001345 P478 Q58001345-C124537D-47BE-4D1B-86AE-C85C3CB241F0 @default.
- Q58001345 P577 Q58001345-11485649-481B-4F7F-9B21-CAEA664246F5 @default.
- Q58001345 P356 TPS.2003.818451 @default.
- Q58001345 P1433 Q4547504 @default.
- Q58001345 P1476 "Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems" @default.
- Q58001345 P2093 "A. Kuzmichev" @default.
- Q58001345 P2093 "I. Goncharuk" @default.
- Q58001345 P304 "994-1000" @default.
- Q58001345 P31 Q13442814 @default.
- Q58001345 P356 "10.1109/TPS.2003.818451" @default.
- Q58001345 P433 "5" @default.
- Q58001345 P478 "31" @default.
- Q58001345 P577 "2003-10-01T00:00:00Z" @default.