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- Q58194362 description "article scientifique publié en 1997" @default.
- Q58194362 description "im Jahr 1997 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58194362 description "wetenschappelijk artikel" @default.
- Q58194362 description "наукова стаття, опублікована в 1997" @default.
- Q58194362 name "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 name "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 type Item @default.
- Q58194362 label "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 label "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 prefLabel "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 prefLabel "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 P1433 Q58194362-4273DAA7-5E67-4EA8-BD6E-3CA51311E7E5 @default.
- Q58194362 P1476 Q58194362-D860AED0-6FB5-45E0-97EF-9734F0A8920F @default.
- Q58194362 P2093 Q58194362-1332DB55-E294-4666-8D8C-10ADE08665A2 @default.
- Q58194362 P2093 Q58194362-325DFBCA-B4D1-4B8E-8F38-F7780E9EA5AE @default.
- Q58194362 P2093 Q58194362-8EB3396C-5E23-484C-BEE0-25D3888648C6 @default.
- Q58194362 P2093 Q58194362-965F55FF-E128-48BE-8832-5946AF46A5C8 @default.
- Q58194362 P2093 Q58194362-98E6CFCB-24B4-4421-B921-36EF40B2525B @default.
- Q58194362 P2093 Q58194362-AADCA88A-2511-47C1-9483-D5FF26AD6EE4 @default.
- Q58194362 P2093 Q58194362-C740B755-8AEC-4B75-B665-B77ED8599157 @default.
- Q58194362 P304 Q58194362-12D63355-201D-4009-AB93-F2EB98708350 @default.
- Q58194362 P31 Q58194362-8AAF75BA-E706-4656-9499-F63FC877EC3C @default.
- Q58194362 P356 Q58194362-8527C8B9-CE13-4017-97F4-D9DF75A572C7 @default.
- Q58194362 P433 Q58194362-5B41406C-CE5A-411C-BAF2-72C5B53654A2 @default.
- Q58194362 P478 Q58194362-ABA9568A-0E5F-4141-9B1A-55A8D0F7CADD @default.
- Q58194362 P577 Q58194362-B60E1C14-230C-49D7-9EF3-6A33312D267C @default.
- Q58194362 P356 84.650134 @default.
- Q58194362 P1433 Q15758112 @default.
- Q58194362 P1476 "Hybrid postprocessing etching for CMOS-compatible MEMS" @default.
- Q58194362 P2093 "C.A. Zincke" @default.
- Q58194362 P2093 "J. Geist" @default.
- Q58194362 P2093 "J.S. Suehle" @default.
- Q58194362 P2093 "M. Gaitan" @default.
- Q58194362 P2093 "M.E. Zaghloul" @default.
- Q58194362 P2093 "N.H. Tea" @default.
- Q58194362 P2093 "V. Milanovic" @default.
- Q58194362 P304 "363-372" @default.
- Q58194362 P31 Q13442814 @default.
- Q58194362 P356 "10.1109/84.650134" @default.
- Q58194362 P433 "4" @default.
- Q58194362 P478 "6" @default.
- Q58194362 P577 "1997-01-01T00:00:00Z" @default.