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- Q58220479 description "article scientifique publié en 2008" @default.
- Q58220479 description "wetenschappelijk artikel" @default.
- Q58220479 description "наукова стаття, опублікована в травні 2008" @default.
- Q58220479 name "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
- Q58220479 name "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
- Q58220479 type Item @default.
- Q58220479 label "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
- Q58220479 label "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
- Q58220479 prefLabel "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
- Q58220479 prefLabel "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
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- Q58220479 P304 Q58220479-A3E62C46-C34C-4BF2-A6CF-DEDB597E9159 @default.
- Q58220479 P31 Q58220479-51E0EB47-8551-460C-959E-71750506733B @default.
- Q58220479 P356 Q58220479-51D4F568-091A-4F3A-A6F1-36B641CC2065 @default.
- Q58220479 P433 Q58220479-38A4C116-18EF-4080-9A5A-542073A2B6AB @default.
- Q58220479 P478 Q58220479-4C936EC7-D48D-4B5A-B0E5-7180545300D5 @default.
- Q58220479 P577 Q58220479-F6F3F12A-C2EA-4F50-8057-B2EFFD617683 @default.
- Q58220479 P356 J.APSUSC.2008.01.150 @default.
- Q58220479 P1433 Q2772524 @default.
- Q58220479 P1476 "Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process" @default.
- Q58220479 P2093 "D.M. Guo" @default.
- Q58220479 P2093 "J. Wang" @default.
- Q58220479 P2093 "K. Wang" @default.
- Q58220479 P2093 "R.K. Kang" @default.
- Q58220479 P304 "4856-4863" @default.
- Q58220479 P31 Q13442814 @default.
- Q58220479 P356 "10.1016/J.APSUSC.2008.01.150" @default.
- Q58220479 P433 "15" @default.
- Q58220479 P478 "254" @default.
- Q58220479 P577 "2008-05-01T00:00:00Z" @default.