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- Q58226197 description "article scientifique publié en 2016" @default.
- Q58226197 description "wetenschappelijk artikel" @default.
- Q58226197 description "наукова стаття, опублікована в жовтні 2016" @default.
- Q58226197 name "Introducing the EUV CNT pellicle" @default.
- Q58226197 name "Introducing the EUV CNT pellicle" @default.
- Q58226197 type Item @default.
- Q58226197 label "Introducing the EUV CNT pellicle" @default.
- Q58226197 label "Introducing the EUV CNT pellicle" @default.
- Q58226197 prefLabel "Introducing the EUV CNT pellicle" @default.
- Q58226197 prefLabel "Introducing the EUV CNT pellicle" @default.
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- Q58226197 P2093 Q58226197-2BBDF700-4D68-4093-85C1-71FC62652888 @default.
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- Q58226197 P2093 Q58226197-85EE1F86-D7BE-4FCB-B4AA-A300DB198B1A @default.
- Q58226197 P2093 Q58226197-893A1127-42C9-4DF5-B710-9A961F2754EF @default.
- Q58226197 P2093 Q58226197-8A281BDD-7563-4264-80FB-967FC7635774 @default.
- Q58226197 P31 Q58226197-D1F1FAAB-1BDC-417A-A0CC-5B4849106F01 @default.
- Q58226197 P356 Q58226197-F9862FB1-0F69-4ACC-8C63-909AE16CB4DB @default.
- Q58226197 P50 Q58226197-B22D2DF1-FD66-46AC-8B16-72FAEC22F9F4 @default.
- Q58226197 P50 Q58226197-C8D52266-7DD6-4358-82DB-BF7A682546B9 @default.
- Q58226197 P577 Q58226197-EA727CA1-0F89-469C-9531-673DFBF6C093 @default.
- Q58226197 P356 12.2243019 @default.
- Q58226197 P1476 "Introducing the EUV CNT pellicle" @default.
- Q58226197 P2093 "Cedric Huyghebaert" @default.
- Q58226197 P2093 "Emily Gallagher" @default.
- Q58226197 P2093 "Houman Zahedmanesh" @default.
- Q58226197 P2093 "Ivan Pollentier" @default.
- Q58226197 P2093 "Jae Uk Lee" @default.
- Q58226197 P2093 "Johannes Vanpaemel" @default.
- Q58226197 P2093 "Marina Timmermans" @default.
- Q58226197 P31 Q13442814 @default.
- Q58226197 P356 "10.1117/12.2243019" @default.
- Q58226197 P50 Q17047973 @default.
- Q58226197 P50 Q56424345 @default.
- Q58226197 P577 "2016-10-25T00:00:00Z" @default.