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- Q58360396 description "article" @default.
- Q58360396 description "wetenschappelijk artikel" @default.
- Q58360396 description "наукова стаття, опублікована в червні 1993" @default.
- Q58360396 name "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 name "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 type Item @default.
- Q58360396 label "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 label "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 prefLabel "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 prefLabel "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 P1433 Q58360396-941043E1-8067-4818-9BAF-05634C13577E @default.
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- Q58360396 P2093 Q58360396-E6EB1354-5BD8-47AD-ADDC-AAB21A1263DF @default.
- Q58360396 P304 Q58360396-62AED57E-7459-420C-B695-D87883F5F4C8 @default.
- Q58360396 P31 Q58360396-8D280568-145F-4534-9A8F-7E938951CCD0 @default.
- Q58360396 P356 Q58360396-90C7A4D1-1EEC-4DC6-BE01-463063C5F04A @default.
- Q58360396 P478 Q58360396-6F2B3A4A-5B7F-4578-BDC5-500DC6B8BE83 @default.
- Q58360396 P577 Q58360396-E33E200A-EAF0-4A38-B882-B5E5C8B4D729 @default.
- Q58360396 P921 Q58360396-ACE2EC23-3236-41C4-82A8-4E42B992FCA5 @default.
- Q58360396 P356 0169-4332(93)90604-A @default.
- Q58360396 P1433 Q2772524 @default.
- Q58360396 P1476 "Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures" @default.
- Q58360396 P2093 "A. Canillas" @default.
- Q58360396 P2093 "E. Bertran" @default.
- Q58360396 P2093 "J. Campmany" @default.
- Q58360396 P2093 "J. Costa" @default.
- Q58360396 P2093 "J.L. Andújar" @default.
- Q58360396 P304 "695-700" @default.
- Q58360396 P31 Q13442814 @default.
- Q58360396 P356 "10.1016/0169-4332(93)90604-A" @default.
- Q58360396 P478 "70-71" @default.
- Q58360396 P577 "1993-06-01T00:00:00Z" @default.
- Q58360396 P921 Q1137203 @default.