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- Q58360417 description "article scientifique publié en 1993" @default.
- Q58360417 description "im Mai 1993 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58360417 description "wetenschappelijk artikel" @default.
- Q58360417 description "наукова стаття, опублікована в травні 1993" @default.
- Q58360417 name "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 name "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 type Item @default.
- Q58360417 label "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 label "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 prefLabel "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 prefLabel "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 P1433 Q58360417-734EE4EE-6EF7-44F7-BB18-29F1410FC2AE @default.
- Q58360417 P1476 Q58360417-7ECC2978-6FD8-4BA0-B165-D3CE2CB5CE24 @default.
- Q58360417 P2093 Q58360417-556890BB-FAAF-4459-B851-655CB335597E @default.
- Q58360417 P2093 Q58360417-7D5D8919-0628-434D-8515-B63A091EBBB9 @default.
- Q58360417 P2093 Q58360417-84C87421-142D-4AF9-BBE6-ED56F49E2A0E @default.
- Q58360417 P2093 Q58360417-B1B25705-4026-4C6D-9BDC-95FD1E17C13E @default.
- Q58360417 P2093 Q58360417-FD101EFC-61E9-42AC-9754-C185444B047F @default.
- Q58360417 P304 Q58360417-1F2F4FB9-E6C6-44CC-B2CE-ADDCBFB013DA @default.
- Q58360417 P31 Q58360417-D7115400-0A12-4426-941D-E85ECBE83CE8 @default.
- Q58360417 P356 Q58360417-199B8403-9251-42AF-9DAD-F36FE0AD8609 @default.
- Q58360417 P433 Q58360417-07D71B58-AC8C-47CC-9256-87445A22B6A6 @default.
- Q58360417 P478 Q58360417-EDC194D7-B1C5-4E60-B24B-945E27838D5F @default.
- Q58360417 P577 Q58360417-483C4615-740C-4AF0-AB5C-74C037C4ECBF @default.
- Q58360417 P921 Q58360417-E793D7F6-61F4-4F03-84C4-BBFEDFBAC029 @default.
- Q58360417 P356 0040-6090(93)90582-A @default.
- Q58360417 P1433 Q2062139 @default.
- Q58360417 P1476 "In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films" @default.
- Q58360417 P2093 "A. Canillas" @default.
- Q58360417 P2093 "E. Bertran" @default.
- Q58360417 P2093 "J. Campmany" @default.
- Q58360417 P2093 "J. Costa" @default.
- Q58360417 P2093 "J.L. Andújar" @default.
- Q58360417 P304 "137-140" @default.
- Q58360417 P31 Q13442814 @default.
- Q58360417 P356 "10.1016/0040-6090(93)90582-A" @default.
- Q58360417 P433 "1-2" @default.
- Q58360417 P478 "228" @default.
- Q58360417 P577 "1993-05-01T00:00:00Z" @default.
- Q58360417 P921 Q1137203 @default.