Matches in Wikidata for { <http://www.wikidata.org/entity/Q58360456> ?p ?o ?g. }
Showing items 1 to 37 of
37
with 100 items per page.
- Q58360456 description "article scientifique publié en 1992" @default.
- Q58360456 description "article" @default.
- Q58360456 description "im Jahr 1992 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58360456 description "wetenschappelijk artikel" @default.
- Q58360456 description "наукова стаття, опублікована в січні 1992" @default.
- Q58360456 name "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 name "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 type Item @default.
- Q58360456 label "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 label "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 prefLabel "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 prefLabel "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 P1433 Q58360456-75341F7D-F6AD-454A-B06D-ED5C63FCD748 @default.
- Q58360456 P1476 Q58360456-9821D16D-AA90-4A4A-B20C-45A58B82C96C @default.
- Q58360456 P2093 Q58360456-08A196F2-712D-4351-80D7-DF11EC5656C6 @default.
- Q58360456 P2093 Q58360456-15244BEF-7AF4-4FF8-8B97-0B63E9D1A6E1 @default.
- Q58360456 P2093 Q58360456-1676220D-E36F-472D-B916-A921817DBB7A @default.
- Q58360456 P2093 Q58360456-2B63C312-22CD-4F35-A8E0-6B9BB9D5DE77 @default.
- Q58360456 P2093 Q58360456-BA0B5C88-9AB2-408E-9C24-1EC5D11DDE86 @default.
- Q58360456 P31 Q58360456-3B6C96EF-C2F0-4458-B7ED-C6B4BBEFEA06 @default.
- Q58360456 P356 Q58360456-9EDE1B19-EBF3-4CD1-ADEC-BB8B4BEB3C36 @default.
- Q58360456 P478 Q58360456-1AB0F364-E136-4BEB-A451-37865D23F529 @default.
- Q58360456 P577 Q58360456-94C2AC8E-12D2-4842-86BE-0ADB17879DC8 @default.
- Q58360456 P921 Q58360456-9839A765-79E3-470A-870B-A5EE8BF0C3E8 @default.
- Q58360456 P356 PROC-284-351 @default.
- Q58360456 P1433 Q26839757 @default.
- Q58360456 P1476 "Composition Analysis of RF Plasma-Deposited Amorphous Silicon Oxynitride Thin Films by Spectroscopic Phase-Modulated Ellipsometry" @default.
- Q58360456 P2093 "A. Canillas" @default.
- Q58360456 P2093 "E. Bertran" @default.
- Q58360456 P2093 "J. Campmany" @default.
- Q58360456 P2093 "J. Costa" @default.
- Q58360456 P2093 "J. L. Andujar" @default.
- Q58360456 P31 Q13442814 @default.
- Q58360456 P356 "10.1557/PROC-284-351" @default.
- Q58360456 P478 "284" @default.
- Q58360456 P577 "1992-01-01T00:00:00Z" @default.
- Q58360456 P921 Q1137203 @default.