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- Q58369128 description "article by A. Benitez et al published June 1993 in Sensors and Actuators A" @default.
- Q58369128 description "im Juni 1993 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58369128 description "wetenschappelijk artikel" @default.
- Q58369128 description "наукова стаття, опублікована в червні 1993" @default.
- Q58369128 name "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 name "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 type Item @default.
- Q58369128 label "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 label "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 prefLabel "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 prefLabel "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 P1433 Q58369128-34E42577-900D-4103-B627-36FB3E54884B @default.
- Q58369128 P1476 Q58369128-BA5B471C-F219-4516-8261-3C0362B20392 @default.
- Q58369128 P2093 Q58369128-02706966-3B8C-4685-A139-E5E68E6E5168 @default.
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- Q58369128 P2093 Q58369128-581E2B96-E018-4A5F-B36B-98FBD3C6DC4D @default.
- Q58369128 P2093 Q58369128-625FF274-14BB-4E0C-9EC7-5FDF413B6790 @default.
- Q58369128 P2093 Q58369128-796F556C-73FE-40DE-8B2E-21CAD8323FE8 @default.
- Q58369128 P2860 Q58369128-84FC94C5-4B99-49FF-A7D3-B92C521CD498 @default.
- Q58369128 P304 Q58369128-5B28571E-06FF-447E-A176-CE0618818EAD @default.
- Q58369128 P31 Q58369128-D558039A-7ED3-4464-A4E7-7AF6B5D392F6 @default.
- Q58369128 P356 Q58369128-83968F5C-752B-42DD-9A2D-A6791520672B @default.
- Q58369128 P478 Q58369128-E6A37D5C-1B5E-43D8-9298-905B97C2B3F0 @default.
- Q58369128 P577 Q58369128-D2C000C5-826B-4D17-8EDC-1C5D82B205DD @default.
- Q58369128 P921 Q58369128-B71D58C0-9030-47BC-B76F-D288202B5F8F @default.
- Q58369128 P356 0924-4247(93)80122-W @default.
- Q58369128 P1433 Q3478639 @default.
- Q58369128 P1476 "Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr" @default.
- Q58369128 P2093 "A. Benitez" @default.
- Q58369128 P2093 "E. Cabruja" @default.
- Q58369128 P2093 "J. Bausells" @default.
- Q58369128 P2093 "J. Esteve" @default.
- Q58369128 P2093 "J. Samitier" @default.
- Q58369128 P2860 Q114769285 @default.
- Q58369128 P304 "723-726" @default.
- Q58369128 P31 Q13442814 @default.
- Q58369128 P356 "10.1016/0924-4247(93)80122-W" @default.
- Q58369128 P478 "37-38" @default.
- Q58369128 P577 "1993-06-01T00:00:00Z" @default.
- Q58369128 P921 Q1137203 @default.