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- Q58375503 description "article scientifique publié en 2011" @default.
- Q58375503 description "wetenschappelijk artikel" @default.
- Q58375503 description "наукова стаття, опублікована у вересні 2011" @default.
- Q58375503 name "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
- Q58375503 name "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
- Q58375503 type Item @default.
- Q58375503 label "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
- Q58375503 label "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
- Q58375503 prefLabel "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
- Q58375503 prefLabel "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
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- Q58375503 P2093 Q58375503-E31FE974-905C-47F2-A487-D824955379AF @default.
- Q58375503 P304 Q58375503-E4E9396C-498C-49BE-B55B-1D950DA2B189 @default.
- Q58375503 P31 Q58375503-AC672880-5136-42F5-81B0-00DD6A307CC1 @default.
- Q58375503 P356 Q58375503-C43EA8D7-1C79-46C1-A913-9896AC0D9BF1 @default.
- Q58375503 P433 Q58375503-6D0DF48D-A0B2-4036-AAE9-D883F141716B @default.
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- Q58375503 P921 Q58375503-91388458-28E5-4F51-8AA7-913471E20C01 @default.
- Q58375503 P356 J.APSUSC.2011.06.141 @default.
- Q58375503 P1433 Q2772524 @default.
- Q58375503 P1476 "Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses" @default.
- Q58375503 P2093 "A. Billard" @default.
- Q58375503 P2093 "E. Aubry" @default.
- Q58375503 P2093 "N. Martin" @default.
- Q58375503 P2093 "S. Weber" @default.
- Q58375503 P304 "10065-10071" @default.
- Q58375503 P31 Q13442814 @default.
- Q58375503 P356 "10.1016/J.APSUSC.2011.06.141" @default.
- Q58375503 P433 "23" @default.
- Q58375503 P478 "257" @default.
- Q58375503 P577 "2011-09-01T00:00:00Z" @default.
- Q58375503 P921 Q1137203 @default.