Matches in Wikidata for { <http://www.wikidata.org/entity/Q58463311> ?p ?o ?g. }
Showing items 1 to 53 of
53
with 100 items per page.
- Q58463311 description "article scientifique publié en 2013" @default.
- Q58463311 description "im Oktober 2013 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58463311 description "scholarly article by L. Monteagudo-Lerma et al published October 2013 in Thin Solid Films" @default.
- Q58463311 description "wetenschappelijk artikel" @default.
- Q58463311 description "наукова стаття, опублікована в жовтні 2013" @default.
- Q58463311 name "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 name "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 type Item @default.
- Q58463311 label "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 label "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 prefLabel "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 prefLabel "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 P1433 Q58463311-5D1CCD11-6871-43A2-A710-E16D1E42B4A1 @default.
- Q58463311 P1476 Q58463311-34C3B5F5-FE26-4878-959D-DF3E75471C97 @default.
- Q58463311 P2093 Q58463311-A3FB6D5B-D680-4E31-8614-0A4F28E197A7 @default.
- Q58463311 P2093 Q58463311-CE06FEA3-AB00-40BA-B979-2946F13F48E1 @default.
- Q58463311 P2093 Q58463311-DEF194B5-4BAB-40DB-B4B7-5FC2486066C4 @default.
- Q58463311 P2093 Q58463311-E3FAB8F9-E0D4-46B0-B10B-27185D47AD18 @default.
- Q58463311 P2860 Q58463311-2A13948D-C0B5-45E9-A698-6A7FE843C1D4 @default.
- Q58463311 P2860 Q58463311-2A908E75-F844-4D0D-8135-F5DEDAF59ED6 @default.
- Q58463311 P2860 Q58463311-5F5BFD1D-B5E5-41F7-8797-CAAA598CC639 @default.
- Q58463311 P2860 Q58463311-6F510308-98B2-4F67-A53D-2E616F37E34C @default.
- Q58463311 P2860 Q58463311-C4D1621D-A994-4F69-B055-997297A5D371 @default.
- Q58463311 P304 Q58463311-D7D7013E-EF8F-4F40-9C88-F66F472FEA59 @default.
- Q58463311 P31 Q58463311-27067330-B7C1-4D18-A3FA-B330AA4300D6 @default.
- Q58463311 P356 Q58463311-EDE621BF-5ED0-47D8-AE0B-34E1BB4720D2 @default.
- Q58463311 P478 Q58463311-38E70AAA-A6E8-4E73-AFCF-95033FD20DC8 @default.
- Q58463311 P50 Q58463311-8F7AF151-2121-4325-9B9F-E69E8C269FF4 @default.
- Q58463311 P50 Q58463311-F10A1CC6-78D8-4185-9360-AEF093836E7B @default.
- Q58463311 P577 Q58463311-1F6EF662-637E-4085-A8A3-3A81E423754B @default.
- Q58463311 P921 Q58463311-019E1959-CD44-47B1-B01C-A273C219D414 @default.
- Q58463311 P921 Q58463311-4DCC5BF3-3597-49B2-AAC2-77DBE30C3699 @default.
- Q58463311 P356 J.TSF.2013.07.062 @default.
- Q58463311 P1433 Q2062139 @default.
- Q58463311 P1476 "Two-step method for the deposition of AlN by radio frequency sputtering" @default.
- Q58463311 P2093 "F.B. Naranjo" @default.
- Q58463311 P2093 "L. Monteagudo-Lerma" @default.
- Q58463311 P2093 "M. González-Herráez" @default.
- Q58463311 P2093 "S. Valdueza-Felip" @default.
- Q58463311 P2860 Q21709313 @default.
- Q58463311 P2860 Q33243962 @default.
- Q58463311 P2860 Q53481540 @default.
- Q58463311 P2860 Q58463428 @default.
- Q58463311 P2860 Q60179239 @default.
- Q58463311 P304 "149-153" @default.
- Q58463311 P31 Q13442814 @default.
- Q58463311 P356 "10.1016/J.TSF.2013.07.062" @default.
- Q58463311 P478 "545" @default.
- Q58463311 P50 Q48059021 @default.
- Q58463311 P50 Q60669470 @default.
- Q58463311 P577 "2013-10-01T00:00:00Z" @default.
- Q58463311 P921 Q1363977 @default.
- Q58463311 P921 Q3396184 @default.