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- Q58477096 description "article scientifique publié en 2008" @default.
- Q58477096 description "im März 2008 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58477096 description "wetenschappelijk artikel" @default.
- Q58477096 description "наукова стаття, опублікована в березні 2008" @default.
- Q58477096 name "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 name "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 type Item @default.
- Q58477096 label "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 label "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 prefLabel "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 prefLabel "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 P1433 Q58477096-5B53DA29-13EB-493A-A69F-5F15DCA2D29E @default.
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- Q58477096 P304 Q58477096-727A425B-D5A2-435B-9B29-FADC7ACD0DEC @default.
- Q58477096 P31 Q58477096-EB357193-5C5F-4DE2-BE9B-B370348F86E7 @default.
- Q58477096 P356 Q58477096-F712771E-292D-4BBD-A01D-5C4838E91447 @default.
- Q58477096 P433 Q58477096-2BBA856A-0E8A-43E9-AB00-60C364C4E7AF @default.
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- Q58477096 P921 Q58477096-462E6FFF-FC7F-478A-8843-ACCEC9356985 @default.
- Q58477096 P356 J.TSF.2007.05.071 @default.
- Q58477096 P1433 Q2062139 @default.
- Q58477096 P1476 "Deep etch-induced damage during ion-assisted chemical etching of sputtered indium–zinc–oxide films in Ar/CH4/H2 plasmas" @default.
- Q58477096 P2093 "F. Schiettekatte" @default.
- Q58477096 P2093 "Jae-Soung Park" @default.
- Q58477096 P2093 "Jeong-Joo Kim" @default.
- Q58477096 P2093 "Joon-Hyung Lee" @default.
- Q58477096 P2093 "Ju-Il Song" @default.
- Q58477096 P2093 "L. Stafford" @default.
- Q58477096 P2093 "M. Chicoine" @default.
- Q58477096 P2093 "S.J. Pearton" @default.
- Q58477096 P2093 "W.T. Lim" @default.
- Q58477096 P2093 "Young-Woo Heo" @default.
- Q58477096 P2860 Q40803390 @default.
- Q58477096 P2860 Q53933723 @default.
- Q58477096 P2860 Q56948926 @default.
- Q58477096 P2860 Q56948961 @default.
- Q58477096 P2860 Q58477121 @default.
- Q58477096 P2860 Q58477149 @default.
- Q58477096 P2860 Q58477220 @default.
- Q58477096 P2860 Q62007305 @default.
- Q58477096 P304 "2869-2873" @default.
- Q58477096 P31 Q13442814 @default.
- Q58477096 P356 "10.1016/J.TSF.2007.05.071" @default.
- Q58477096 P433 "10" @default.
- Q58477096 P478 "516" @default.
- Q58477096 P577 "2008-03-01T00:00:00Z" @default.
- Q58477096 P921 Q37129 @default.