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- Q58480310 description "im März 2014 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58480310 description "scholarly article by Carlos M. Gonzalez et al published March 2014 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B" @default.
- Q58480310 description "wetenschappelijk artikel" @default.
- Q58480310 description "наукова стаття, опублікована в березні 2014" @default.
- Q58480310 name "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
- Q58480310 name "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
- Q58480310 type Item @default.
- Q58480310 label "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
- Q58480310 label "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
- Q58480310 prefLabel "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
- Q58480310 prefLabel "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
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- Q58480310 P356 1.4868027 @default.
- Q58480310 P1433 Q27724301 @default.
- Q58480310 P1476 "Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair" @default.
- Q58480310 P2093 "Carlos M. Gonzalez" @default.
- Q58480310 P2093 "Gerd Duscher" @default.
- Q58480310 P2093 "Huimeng M. Wu" @default.
- Q58480310 P2093 "Jeff T. M. De Hosson" @default.
- Q58480310 P2093 "Kate L. Klein" @default.
- Q58480310 P2093 "Lewis A. Stern" @default.
- Q58480310 P2093 "Philip D. Rack" @default.
- Q58480310 P2093 "Rajendra Timilsina" @default.
- Q58480310 P2093 "Willem F. van Dorp" @default.
- Q58480310 P2093 "Winand Slingenbergh" @default.
- Q58480310 P304 "021602" @default.
- Q58480310 P31 Q13442814 @default.
- Q58480310 P356 "10.1116/1.4868027" @default.
- Q58480310 P433 "2" @default.
- Q58480310 P478 "32" @default.
- Q58480310 P50 Q61757301 @default.
- Q58480310 P577 "2014-03-01T00:00:00Z" @default.
- Q58480310 P921 Q654 @default.