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- Q58728527 description "article scientifique publié en 2007" @default.
- Q58728527 description "im Oktober 2007 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58728527 description "wetenschappelijk artikel" @default.
- Q58728527 description "наукова стаття, опублікована в жовтні 2007" @default.
- Q58728527 name "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
- Q58728527 name "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
- Q58728527 type Item @default.
- Q58728527 label "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
- Q58728527 label "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
- Q58728527 prefLabel "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
- Q58728527 prefLabel "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
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- Q58728527 P304 Q58728527-1C289237-AA2F-455A-8C61-3F77B5D39037 @default.
- Q58728527 P31 Q58728527-97ECB1B2-8D3F-4340-843F-19D93D8B8448 @default.
- Q58728527 P356 Q58728527-B37824B7-512B-472C-B488-49EE402ED6A1 @default.
- Q58728527 P433 Q58728527-811F8EB1-CF91-42EE-8798-33FE20D6F250 @default.
- Q58728527 P478 Q58728527-8A583B4C-51B1-4F72-8BAA-63FB70977AA9 @default.
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- Q58728527 P577 Q58728527-A2999500-0FE5-452D-8BCF-3C200169B15F @default.
- Q58728527 P356 J.SSE.2007.08.012 @default.
- Q58728527 P1433 Q16459978 @default.
- Q58728527 P1476 "Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma" @default.
- Q58728527 P2093 "M. Miyauchi" @default.
- Q58728527 P2093 "Y. Miyoshi" @default.
- Q58728527 P2093 "Z.Lj. Petrović" @default.
- Q58728527 P304 "1418-1424" @default.
- Q58728527 P31 Q13442814 @default.
- Q58728527 P356 "10.1016/J.SSE.2007.08.012" @default.
- Q58728527 P433 "10" @default.
- Q58728527 P478 "51" @default.
- Q58728527 P50 Q11582936 @default.
- Q58728527 P577 "2007-10-01T00:00:00Z" @default.