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- Q58728663 description "article scientifique publié en 2006" @default.
- Q58728663 description "im Oktober 2006 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58728663 description "wetenschappelijk artikel" @default.
- Q58728663 description "наукова стаття, опублікована в жовтні 2006" @default.
- Q58728663 name "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 name "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 type Item @default.
- Q58728663 label "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 label "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 prefLabel "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 prefLabel "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 P1433 Q58728663-E17A9E1A-0E56-4176-ADAA-6F9707937E42 @default.
- Q58728663 P1476 Q58728663-FD5A15F8-86C2-4D70-9F6C-19748A0F4D8F @default.
- Q58728663 P2093 Q58728663-D211513B-64CE-497A-984F-15F78434AC77 @default.
- Q58728663 P2093 Q58728663-D8337884-DFB9-4218-8895-E1C50658797F @default.
- Q58728663 P304 Q58728663-61827D80-5D1E-403D-B968-B4B761FDC9BC @default.
- Q58728663 P31 Q58728663-204915CB-4063-4F6F-AEEB-D3E801A2EB7D @default.
- Q58728663 P356 Q58728663-767334B6-5DCA-4DB7-950C-9F4244522E03 @default.
- Q58728663 P433 Q58728663-01C07EC2-3014-45C0-B029-FDF0D59212DC @default.
- Q58728663 P478 Q58728663-D01E9935-98A0-4768-AC33-0F00A2ED9FB2 @default.
- Q58728663 P577 Q58728663-7DE4E818-2D23-47E5-A8C7-6199EB87F4D1 @default.
- Q58728663 P356 JJAP.45.8151 @default.
- Q58728663 P1433 Q2366671 @default.
- Q58728663 P1476 "Analysis of a Capacitively Coupled Dual-Frequency CF4Discharge" @default.
- Q58728663 P2093 "Z. Donkó" @default.
- Q58728663 P2093 "Z. Lj. Petrović" @default.
- Q58728663 P304 "8151-8156" @default.
- Q58728663 P31 Q13442814 @default.
- Q58728663 P356 "10.1143/JJAP.45.8151" @default.
- Q58728663 P433 "10B" @default.
- Q58728663 P478 "45" @default.
- Q58728663 P577 "2006-10-24T00:00:00Z" @default.