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- Q58886040 description "im Dezember 2013 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58886040 description "wetenschappelijk artikel" @default.
- Q58886040 description "наукова стаття, опублікована в грудні 2013" @default.
- Q58886040 name "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 name "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 type Item @default.
- Q58886040 label "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 label "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 prefLabel "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 prefLabel "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 P1433 Q58886040-CD92C16C-940A-4E53-9E28-BEF3F73474A7 @default.
- Q58886040 P1476 Q58886040-CAAA72EC-FBAE-49C2-A4A1-D9AF536F813A @default.
- Q58886040 P2093 Q58886040-3962B214-0ACF-4FF8-91CF-E0240458837F @default.
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- Q58886040 P2093 Q58886040-BC926BDF-68D2-497E-9BB9-924CB769B495 @default.
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- Q58886040 P2093 Q58886040-E8635DC1-3F5F-4F8D-9046-29E4EADF1542 @default.
- Q58886040 P304 Q58886040-49AC04BE-2587-48B4-A2EF-8CCF51128010 @default.
- Q58886040 P31 Q58886040-91E666C9-9209-4771-B110-71280BFE4E73 @default.
- Q58886040 P356 Q58886040-0DE6DE00-14CE-40E9-8555-BB75D93DBA4E @default.
- Q58886040 P433 Q58886040-BB1C970B-C26C-41FC-BBB2-B55B85EA64F9 @default.
- Q58886040 P478 Q58886040-56CC973E-5E65-4F40-8CE4-8B8EBAF44823 @default.
- Q58886040 P50 Q58886040-09DADC30-5340-4F73-A53F-4F80B002759E @default.
- Q58886040 P50 Q58886040-6862AC88-C20E-47D4-A6BD-14992C0AA3F5 @default.
- Q58886040 P577 Q58886040-963C2A8E-F914-4EEE-B049-5C75A621B40E @default.
- Q58886040 P921 Q58886040-058C4AA7-326B-4A90-9785-2E0D65B1E1DD @default.
- Q58886040 P356 J.CCR.2013.04.010 @default.
- Q58886040 P1433 Q2996636 @default.
- Q58886040 P1476 "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials" @default.
- Q58886040 P2093 "Byung Joon Choi" @default.
- Q58886040 P2093 "Jeong Hwan Han" @default.
- Q58886040 P2093 "Sang Woon Lee" @default.
- Q58886040 P2093 "Seul Ji Song" @default.
- Q58886040 P2093 "Taeyong Eom" @default.
- Q58886040 P2093 "Woongkyu Lee" @default.
- Q58886040 P304 "3154-3176" @default.
- Q58886040 P31 Q13442814 @default.
- Q58886040 P356 "10.1016/J.CCR.2013.04.010" @default.
- Q58886040 P433 "23-24" @default.
- Q58886040 P478 "257" @default.
- Q58886040 P50 Q50650729 @default.
- Q58886040 P50 Q87636812 @default.
- Q58886040 P577 "2013-12-01T00:00:00Z" @default.
- Q58886040 P921 Q909510 @default.