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- Q58886061 description "article published in 2011" @default.
- Q58886061 description "im Januar 2011 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58886061 description "wetenschappelijk artikel" @default.
- Q58886061 description "наукова стаття, опублікована у 2011" @default.
- Q58886061 name "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
- Q58886061 name "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
- Q58886061 type Item @default.
- Q58886061 label "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
- Q58886061 label "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
- Q58886061 prefLabel "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
- Q58886061 prefLabel "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
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- Q58886061 P356 1.3596018 @default.
- Q58886061 P1433 Q3186957 @default.
- Q58886061 P1476 "Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature" @default.
- Q58886061 P2093 "Gun Hwan Kim" @default.
- Q58886061 P2093 "Jae Hyuck Jang" @default.
- Q58886061 P2093 "Jeong Hwan Han" @default.
- Q58886061 P2093 "Sora Han" @default.
- Q58886061 P2860 Q44870275 @default.
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- Q58886061 P304 "D477" @default.
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- Q58886061 P356 "10.1149/1.3596018" @default.
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- Q58886061 P577 "2011-01-01T00:00:00Z" @default.
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