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- Q58886091 description "article scientifique publié en 2008" @default.
- Q58886091 description "im Januar 2008 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58886091 description "scholarly article by Minha Seo et al published 2008 in Journal of Materials Chemistry" @default.
- Q58886091 description "wetenschappelijk artikel" @default.
- Q58886091 description "наукова стаття, опублікована у 2008" @default.
- Q58886091 name "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 name "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 type Item @default.
- Q58886091 label "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 label "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 prefLabel "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 prefLabel "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 P1433 Q58886091-263A1F8A-9FEA-4F56-A128-4D3F945B8EE4 @default.
- Q58886091 P1476 Q58886091-6F052FA0-C5AF-4A77-B252-ACEDA236F806 @default.
- Q58886091 P2093 Q58886091-05A0D184-65BC-40F5-9C72-0233E4642E58 @default.
- Q58886091 P2093 Q58886091-35C81791-A136-4AB9-ACBD-D0C1F1529630 @default.
- Q58886091 P2093 Q58886091-67BEE2C6-5B04-4F8E-A86B-46A7E1F61F19 @default.
- Q58886091 P2093 Q58886091-ABFD4939-257F-492A-B1A1-D8EC9B82DFE3 @default.
- Q58886091 P2093 Q58886091-F067D159-AF33-44D8-8CE1-548C7342FF65 @default.
- Q58886091 P304 Q58886091-65BBCF55-D6F1-475A-805D-CF4A8BC88DB8 @default.
- Q58886091 P31 Q58886091-CA0867C4-E1D5-4CA4-B794-567C1DB51CB8 @default.
- Q58886091 P356 Q58886091-06AE96BF-F988-492D-B742-7B9DD0D4E2C5 @default.
- Q58886091 P433 Q58886091-9F368563-E4F8-4EED-96C3-D7FA28B8A2F1 @default.
- Q58886091 P478 Q58886091-E2E696A8-2FC2-46F5-950B-D8492BBF42EA @default.
- Q58886091 P50 Q58886091-753D4DFD-E1CF-4434-90A6-0092A8CC616F @default.
- Q58886091 P50 Q58886091-EA96F7A2-ECED-421D-90BD-FAACC493F1DC @default.
- Q58886091 P577 Q58886091-0FBCC40C-BF30-4F53-AF4B-1B1D3387F0E6 @default.
- Q58886091 P921 Q58886091-45A063F1-FEF9-4431-A100-24790A360AB1 @default.
- Q58886091 P356 B806382F @default.
- Q58886091 P1433 Q2258281 @default.
- Q58886091 P1476 "Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability" @default.
- Q58886091 P2093 "Jeong Hwan Kim" @default.
- Q58886091 P2093 "Kwang Duk Na" @default.
- Q58886091 P2093 "Minha Seo" @default.
- Q58886091 P2093 "Tae Joo Park" @default.
- Q58886091 P2093 "Yo-Sep Min" @default.
- Q58886091 P304 "4324" @default.
- Q58886091 P31 Q13442814 @default.
- Q58886091 P356 "10.1039/B806382F" @default.
- Q58886091 P433 "36" @default.
- Q58886091 P478 "18" @default.
- Q58886091 P50 Q50650729 @default.
- Q58886091 P50 Q87636812 @default.
- Q58886091 P577 "2008-01-01T00:00:00Z" @default.
- Q58886091 P921 Q1119 @default.