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- Q58886114 description "article published in 2005" @default.
- Q58886114 description "article scientifique publié en 2005" @default.
- Q58886114 description "im Januar 2005 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58886114 description "wetenschappelijk artikel" @default.
- Q58886114 description "наукова стаття, опублікована у 2005" @default.
- Q58886114 name "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
- Q58886114 name "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
- Q58886114 type Item @default.
- Q58886114 label "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
- Q58886114 label "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
- Q58886114 prefLabel "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
- Q58886114 prefLabel "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
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- Q58886114 P356 1.2081994 @default.
- Q58886114 P1433 Q3050583 @default.
- Q58886114 P1476 "Structurally and Electrically Uniform Deposition of High-k TiO[sub 2] Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition" @default.
- Q58886114 P2093 "Chung Bae Jeon" @default.
- Q58886114 P2093 "Jaehack Jeong" @default.
- Q58886114 P2093 "Kyung-Min Kim" @default.
- Q58886114 P2093 "Oh Seong Kwon" @default.
- Q58886114 P2093 "Sang Woon Lee" @default.
- Q58886114 P2093 "Woo Young Park" @default.
- Q58886114 P2860 Q29038146 @default.
- Q58886114 P2860 Q58886117 @default.
- Q58886114 P304 "F59" @default.
- Q58886114 P31 Q13442814 @default.
- Q58886114 P356 "10.1149/1.2081994" @default.
- Q58886114 P433 "12" @default.
- Q58886114 P478 "8" @default.
- Q58886114 P50 Q50650729 @default.
- Q58886114 P50 Q87636812 @default.
- Q58886114 P577 "2005-01-01T00:00:00Z" @default.
- Q58886114 P921 Q1137203 @default.