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- Q58889423 description "im August 2016 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58889423 description "wetenschappelijk artikel" @default.
- Q58889423 description "наукова стаття, опублікована в серпні 2016" @default.
- Q58889423 name "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 name "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 type Item @default.
- Q58889423 label "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 label "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 prefLabel "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 prefLabel "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 P1433 Q58889423-C52FEAE2-6DEC-4FDB-88C3-E65BDF002864 @default.
- Q58889423 P1476 Q58889423-FE31034C-7148-4A27-A585-39E450DB377E @default.
- Q58889423 P2093 Q58889423-03299129-2FC0-4D8C-9C51-E96876AB4622 @default.
- Q58889423 P2093 Q58889423-6A0E5156-17A5-4AA6-84B6-EFAE9B66AB0B @default.
- Q58889423 P2093 Q58889423-D76B230F-6BCB-4F9C-B862-9163BAA3E2AB @default.
- Q58889423 P304 Q58889423-F9B9547B-FE3A-4276-9D58-26A01A83E102 @default.
- Q58889423 P31 Q58889423-451D8BD6-B5BC-4365-90D8-5E4213BA9128 @default.
- Q58889423 P356 Q58889423-4778832D-4D81-46C7-9FB3-90AAD8608BDC @default.
- Q58889423 P433 Q58889423-7EB6DEA2-D825-4F47-8C50-C538E42768AA @default.
- Q58889423 P478 Q58889423-B16D1B39-C355-4BA5-B1A2-E27E3AD54351 @default.
- Q58889423 P50 Q58889423-178B1F7A-FE4D-468C-846E-E00C2A5FD74F @default.
- Q58889423 P50 Q58889423-63F185B4-C763-44E3-B97C-E8189FE6F212 @default.
- Q58889423 P577 Q58889423-33C1B0FD-01DE-4306-B820-213C125012CE @default.
- Q58889423 P356 385201 @default.
- Q58889423 P1433 Q2587435 @default.
- Q58889423 P1476 "Elucidating the effects of gas flow rate on an SF6inductively coupled plasma and on the silicon etch rate, by a combined experimental and theoretical investigation" @default.
- Q58889423 P2093 "Rémi Dussart" @default.
- Q58889423 P2093 "Stefan Tinck" @default.
- Q58889423 P2093 "Thomas Tillocher" @default.
- Q58889423 P304 "385201" @default.
- Q58889423 P31 Q13442814 @default.
- Q58889423 P356 "10.1088/0022-3727/49/38/385201" @default.
- Q58889423 P433 "38" @default.
- Q58889423 P478 "49" @default.
- Q58889423 P50 Q28364722 @default.
- Q58889423 P50 Q44487888 @default.
- Q58889423 P577 "2016-08-24T00:00:00Z" @default.