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- Q58892651 description "article scientifique publié en 1995" @default.
- Q58892651 description "article" @default.
- Q58892651 description "im März 1995 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58892651 description "wetenschappelijk artikel" @default.
- Q58892651 description "наукова стаття, опублікована в березні 1995" @default.
- Q58892651 description "հոդված" @default.
- Q58892651 name "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 name "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 type Item @default.
- Q58892651 label "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 label "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 prefLabel "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 prefLabel "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 P1433 Q58892651-93BDA59D-C0C2-4DDA-99AE-743DC79AB5A6 @default.
- Q58892651 P1476 Q58892651-5B77EE60-8A66-49E5-A35F-4007524A1280 @default.
- Q58892651 P2093 Q58892651-13115976-0DE8-4ED4-A091-37660E897301 @default.
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- Q58892651 P2860 Q58892651-646E2E7D-B62E-474F-A107-19D26315A56C @default.
- Q58892651 P2860 Q58892651-FA96EF47-40DD-44EA-A846-2ACA560081B6 @default.
- Q58892651 P304 Q58892651-D36B1692-8FC5-46F7-A135-A418F39ECF0D @default.
- Q58892651 P31 Q58892651-3A5A7112-2ECD-4BCE-A78E-A2370CF0F38C @default.
- Q58892651 P356 Q58892651-414FDBE1-F58E-49F1-B93E-BBC2B4324FAA @default.
- Q58892651 P433 Q58892651-506179F0-0F66-428B-A77B-A60B2CFC24F6 @default.
- Q58892651 P478 Q58892651-50E9C7E4-F748-4ABF-81C3-F2081E336B9B @default.
- Q58892651 P50 Q58892651-CAE61512-AFC7-4ECB-8A72-F00C07609E6A @default.
- Q58892651 P577 Q58892651-FB5BFF98-0A0F-4E96-A7B2-29F0795C83C9 @default.
- Q58892651 P356 1.358887 @default.
- Q58892651 P1433 Q1987941 @default.
- Q58892651 P1476 "Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method" @default.
- Q58892651 P2093 "Mark van Straaten" @default.
- Q58892651 P2093 "Renaat Gijbels" @default.
- Q58892651 P2860 Q63384028 @default.
- Q58892651 P2860 Q77844346 @default.
- Q58892651 P304 "1868-1874" @default.
- Q58892651 P31 Q13442814 @default.
- Q58892651 P356 "10.1063/1.358887" @default.
- Q58892651 P433 "5" @default.
- Q58892651 P478 "77" @default.
- Q58892651 P50 Q28364722 @default.
- Q58892651 P577 "1995-03-01T00:00:00Z" @default.