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- Q58897008 description "wetenschappelijk artikel" @default.
- Q58897008 description "наукова стаття, опублікована в червні 2009" @default.
- Q58897008 name "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 name "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 type Item @default.
- Q58897008 label "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 label "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 prefLabel "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 prefLabel "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 P1476 Q58897008-A84902A5-3785-4E55-9F88-5E1215EA9F00 @default.
- Q58897008 P2093 Q58897008-0AB3AFCD-9B45-47C3-A1E8-717705208570 @default.
- Q58897008 P2093 Q58897008-205F4252-B5B3-4AA0-A4D4-85B01EC850FA @default.
- Q58897008 P31 Q58897008-DFCB97B7-AE5F-4597-A292-E2DC2D64CF9F @default.
- Q58897008 P356 Q58897008-5F5A6567-EFEC-4731-A12C-99E9D868C3CE @default.
- Q58897008 P50 Q58897008-DDD2A5F0-ED07-4861-8F83-BF681D5C6419 @default.
- Q58897008 P577 Q58897008-C034850D-77F2-4D31-9121-13D2694FF42C @default.
- Q58897008 P921 Q58897008-3EBA5080-2ACE-4D87-AB64-8724CAB4FF44 @default.
- Q58897008 P356 SENSOR.2009.5285734 @default.
- Q58897008 P1476 "Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials" @default.
- Q58897008 P2093 "J. Oberhammer" @default.
- Q58897008 P2093 "M. Sterner" @default.
- Q58897008 P31 Q13442814 @default.
- Q58897008 P356 "10.1109/SENSOR.2009.5285734" @default.
- Q58897008 P50 Q46707604 @default.
- Q58897008 P577 "2009-06-01T00:00:00Z" @default.
- Q58897008 P921 Q497166 @default.