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- Q58897021 description "article scientifique publié en 2008" @default.
- Q58897021 description "wetenschappelijk artikel" @default.
- Q58897021 description "наукова стаття, опублікована в січні 2008" @default.
- Q58897021 name "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 name "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 type Item @default.
- Q58897021 label "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 label "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 prefLabel "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 prefLabel "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 P1476 Q58897021-56FFA9F9-587C-4D98-B06E-2E5CD00C6B03 @default.
- Q58897021 P2093 Q58897021-6E392691-2092-400F-B45D-411A71302396 @default.
- Q58897021 P2093 Q58897021-C482415C-01D9-424B-9522-8593FBECB186 @default.
- Q58897021 P2093 Q58897021-C93FC3D6-72C2-419E-B6C5-2221FF49F1FD @default.
- Q58897021 P31 Q58897021-351FC3A6-F689-43C7-B0A3-0C5807B527EB @default.
- Q58897021 P356 Q58897021-1391D742-DB6A-4C97-9BAC-C19DBA08A7B4 @default.
- Q58897021 P50 Q58897021-A12E18E6-3430-423E-96D8-D639227747DC @default.
- Q58897021 P577 Q58897021-21B42C9F-21C7-4AF1-87B9-B2ABAF80DADE @default.
- Q58897021 P356 MEMSYS.2008.4443673 @default.
- Q58897021 P1476 "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices" @default.
- Q58897021 P2093 "J. Oberhammer" @default.
- Q58897021 P2093 "M. Sterner" @default.
- Q58897021 P2093 "N. Roxhed" @default.
- Q58897021 P31 Q13442814 @default.
- Q58897021 P356 "10.1109/MEMSYS.2008.4443673" @default.
- Q58897021 P50 Q46707604 @default.
- Q58897021 P577 "2008-01-01T00:00:00Z" @default.