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- Q58897045 description "article published in 2007" @default.
- Q58897045 description "artículu científicu" @default.
- Q58897045 description "im April 2007 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58897045 description "wetenschappelijk artikel" @default.
- Q58897045 description "наукова стаття, опублікована у квітні 2007" @default.
- Q58897045 name "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 name "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 type Item @default.
- Q58897045 label "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 label "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 prefLabel "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 prefLabel "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 P1433 Q58897045-46D86D08-64B6-41B6-91B1-8B8413DC11A5 @default.
- Q58897045 P1476 Q58897045-1962FC48-CEEE-4423-B8D4-16A5B7542AF1 @default.
- Q58897045 P2093 Q58897045-44849032-1640-455B-B148-39D2FA3FB7B3 @default.
- Q58897045 P2093 Q58897045-62A0CED1-CEC1-42CC-8E7C-7BD1B3305BD4 @default.
- Q58897045 P2093 Q58897045-7C151C81-7FA4-4E7A-B8EB-8763506712CE @default.
- Q58897045 P304 Q58897045-46C6C535-F048-4AE3-BA99-F23556D8FB35 @default.
- Q58897045 P31 Q58897045-6EC6CD92-80F7-46AF-A196-C54A1CF9DE41 @default.
- Q58897045 P356 Q58897045-AA4A5BB1-D765-4449-92FD-9EDF88438D08 @default.
- Q58897045 P433 Q58897045-7CAB7CF5-35F7-4D29-B452-1E2E57A6C04C @default.
- Q58897045 P478 Q58897045-007CEFBF-6FF9-472B-9343-7E93A13CC2CA @default.
- Q58897045 P577 Q58897045-8E235585-123A-4302-AA14-24A693597145 @default.
- Q58897045 P356 031 @default.
- Q58897045 P1433 Q15708721 @default.
- Q58897045 P1476 "A method for tapered deep reactive ion etching using a modified Bosch process" @default.
- Q58897045 P2093 "Göran Stemme" @default.
- Q58897045 P2093 "Niclas Roxhed" @default.
- Q58897045 P2093 "Patrick Griss" @default.
- Q58897045 P304 "1087-1092" @default.
- Q58897045 P31 Q13442814 @default.
- Q58897045 P356 "10.1088/0960-1317/17/5/031" @default.
- Q58897045 P433 "5" @default.
- Q58897045 P478 "17" @default.
- Q58897045 P577 "2007-04-24T00:00:00Z" @default.