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- Q58897193 description "article scientifique publié en 2004" @default.
- Q58897193 description "im Juni 2004 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58897193 description "wetenschappelijk artikel" @default.
- Q58897193 description "наукова стаття, опублікована в червні 2004" @default.
- Q58897193 name "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 name "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 type Item @default.
- Q58897193 label "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 label "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 prefLabel "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 prefLabel "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 P1433 Q58897193-8AC8F6C9-4F29-4F6F-A342-F49C841A6791 @default.
- Q58897193 P1476 Q58897193-3589511D-96E1-475C-B3D3-70B6CD4A4A6D @default.
- Q58897193 P2093 Q58897193-C8AED9DC-9E50-41E1-A44C-8010C60B9EA7 @default.
- Q58897193 P304 Q58897193-472EC65F-A7CC-4043-A9CA-F4C10988BE9F @default.
- Q58897193 P31 Q58897193-383865F5-44E1-446C-B4FB-784F0D8693D4 @default.
- Q58897193 P356 Q58897193-4F2A9362-C0F6-46F7-A6C7-5504B4755B41 @default.
- Q58897193 P433 Q58897193-FFF5F210-8F27-4617-B550-CF0419B06A03 @default.
- Q58897193 P478 Q58897193-3B8A87D1-B079-4D78-ADC5-BB8C887C5FC7 @default.
- Q58897193 P50 Q58897193-AE82F74E-6F2C-4ADF-A976-A1750F3E49F8 @default.
- Q58897193 P577 Q58897193-B4EE3768-F896-40B4-BD19-B30C0E759E67 @default.
- Q58897193 P356 JMEMS.2004.828723 @default.
- Q58897193 P1433 Q15758112 @default.
- Q58897193 P1476 "Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch" @default.
- Q58897193 P2093 "J. Oberhammer" @default.
- Q58897193 P304 "421-428" @default.
- Q58897193 P31 Q13442814 @default.
- Q58897193 P356 "10.1109/JMEMS.2004.828723" @default.
- Q58897193 P433 "3" @default.
- Q58897193 P478 "13" @default.
- Q58897193 P50 Q46707604 @default.
- Q58897193 P577 "2004-06-01T00:00:00Z" @default.