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- Q58897306 description "article scientifique publié en 2001" @default.
- Q58897306 description "im Jahr 2001 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58897306 description "wetenschappelijk artikel" @default.
- Q58897306 description "наукова стаття, опублікована у 2001" @default.
- Q58897306 name "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 name "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 type Item @default.
- Q58897306 label "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 label "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 prefLabel "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 prefLabel "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 P1433 Q58897306-8FF78CE5-18FB-4C74-99E3-AB6CF61FE16A @default.
- Q58897306 P1476 Q58897306-5B14AE72-6E43-4EF1-A7B6-7122C53C10A4 @default.
- Q58897306 P2093 Q58897306-428CD8E4-EFFB-4E0F-ACE4-93BCF2C99379 @default.
- Q58897306 P2093 Q58897306-5C3535FB-D506-4990-9E19-FE70C7EF62C7 @default.
- Q58897306 P2093 Q58897306-FCA68B39-A983-48B6-96A5-553D409424F3 @default.
- Q58897306 P304 Q58897306-4F005591-CF1D-494B-9231-4CB1BA419AC8 @default.
- Q58897306 P31 Q58897306-0F56F76D-62F5-4FA3-8669-475CDE5780FA @default.
- Q58897306 P356 Q58897306-F837F4BC-9620-4BC4-8C17-B9A6C075A8C3 @default.
- Q58897306 P433 Q58897306-D631D6F0-4311-4BA2-BB9B-AF9C666A2BFA @default.
- Q58897306 P478 Q58897306-3EDB3C1E-8C2F-41B5-884F-DEC2DF584143 @default.
- Q58897306 P577 Q58897306-C0090BAD-2222-44BC-B0ED-70A27939C00D @default.
- Q58897306 P356 84.967371 @default.
- Q58897306 P1433 Q15758112 @default.
- Q58897306 P1476 "A surface-micromachined resonant-beam pressure-sensing structure" @default.
- Q58897306 P2093 "E. Kalvesten" @default.
- Q58897306 P2093 "G. Stemme" @default.
- Q58897306 P2093 "P. Melvas" @default.
- Q58897306 P304 "498-502" @default.
- Q58897306 P31 Q13442814 @default.
- Q58897306 P356 "10.1109/84.967371" @default.
- Q58897306 P433 "4" @default.
- Q58897306 P478 "10" @default.
- Q58897306 P577 "2001-01-01T00:00:00Z" @default.