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- Q58897466 description "article published in 1990" @default.
- Q58897466 description "article scientifique publié en 1990" @default.
- Q58897466 description "im März 1990 veröffentlichter wissenschaftlicher Artikel" @default.
- Q58897466 description "wetenschappelijk artikel" @default.
- Q58897466 description "наукова стаття, опублікована в березні 1990" @default.
- Q58897466 name "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 name "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 type Item @default.
- Q58897466 label "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 label "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 prefLabel "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 prefLabel "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 P1433 Q58897466-37B672BB-A267-4FAE-AFAF-9C1DCCB3C2B9 @default.
- Q58897466 P1476 Q58897466-EAEBD97F-E808-4694-8BA9-30C48AA39E90 @default.
- Q58897466 P2093 Q58897466-35A93F26-4FDF-4462-A8B3-2460E7609BC3 @default.
- Q58897466 P2093 Q58897466-F4A26DA8-C9F8-41AC-B512-FB8C158C6AF6 @default.
- Q58897466 P304 Q58897466-A51580BF-1CB0-4289-8E72-65D98208E8F7 @default.
- Q58897466 P31 Q58897466-2402DD36-7869-4896-920A-2CCBB48FC61E @default.
- Q58897466 P356 Q58897466-44CB4422-3D1F-4A66-B88C-68F39D0E2494 @default.
- Q58897466 P433 Q58897466-BA1A2397-5377-4C22-88F9-DC99318A353C @default.
- Q58897466 P478 Q58897466-4B503CD8-3A62-4AB9-B620-AEB3EF72424E @default.
- Q58897466 P577 Q58897466-E2EF7C0B-96EA-47B6-8F0B-DD80D688B593 @default.
- Q58897466 P356 16.47769 @default.
- Q58897466 P1433 Q2269764 @default.
- Q58897466 P1476 "A balanced dual-diaphragm resonant pressure sensor in silicon" @default.
- Q58897466 P2093 "E. Stemme" @default.
- Q58897466 P2093 "G. Stemme" @default.
- Q58897466 P304 "648-653" @default.
- Q58897466 P31 Q13442814 @default.
- Q58897466 P356 "10.1109/16.47769" @default.
- Q58897466 P433 "3" @default.
- Q58897466 P478 "37" @default.
- Q58897466 P577 "1990-03-01T00:00:00Z" @default.