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- Q58921470 description "article published in 2000" @default.
- Q58921470 description "article scientifique publié en 2000" @default.
- Q58921470 description "wetenschappelijk artikel" @default.
- Q58921470 description "наукова стаття, опублікована в серпні 2000" @default.
- Q58921470 name "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 name "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 type Item @default.
- Q58921470 label "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 label "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 prefLabel "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 prefLabel "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 P1476 Q58921470-DE32DD9C-797D-4A86-8E75-28254750DF81 @default.
- Q58921470 P2093 Q58921470-04CF186B-3E30-4BE6-B3D8-F0AAD350C6BA @default.
- Q58921470 P2093 Q58921470-2B1747AB-D50B-44D4-9348-65A059D9FEE3 @default.
- Q58921470 P2093 Q58921470-2FFC64D8-7A59-47EA-BF5E-784B69FEEE69 @default.
- Q58921470 P2093 Q58921470-6E32CF35-5CCE-449D-AC6C-91A6F3F9BE4A @default.
- Q58921470 P2093 Q58921470-944CDEF7-B78D-4E8B-864D-F0B33493413F @default.
- Q58921470 P2093 Q58921470-A65A5C42-8BDD-4696-AC37-E2241B62153C @default.
- Q58921470 P31 Q58921470-BC4DC1CA-5498-47E6-B9D1-EF12DE4094BE @default.
- Q58921470 P356 Q58921470-9AD9CA6A-0E66-4B24-90B2-16A5D4ACD6F5 @default.
- Q58921470 P577 Q58921470-F24CA42F-A6CF-472A-8ECB-E39F50721EB7 @default.
- Q58921470 P356 12.395700 @default.
- Q58921470 P1476 "Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages" @default.
- Q58921470 P2093 "Arman Gasparyan" @default.
- Q58921470 P2093 "Carolyn D. White" @default.
- Q58921470 P2093 "David Abusch-Magder" @default.
- Q58921470 P2093 "Herbert R. Shea" @default.
- Q58921470 P2093 "Robert B. Comizzoli" @default.
- Q58921470 P2093 "Susanne Arney" @default.
- Q58921470 P31 Q13442814 @default.
- Q58921470 P356 "10.1117/12.395700" @default.
- Q58921470 P577 "2000-08-10T00:00:00Z" @default.