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- Q58921472 description "article published in 2000" @default.
- Q58921472 description "article scientifique publié en 2000" @default.
- Q58921472 description "wetenschappelijk artikel" @default.
- Q58921472 description "наукова стаття, опублікована в серпні 2000" @default.
- Q58921472 name "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 name "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 type Item @default.
- Q58921472 label "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 label "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 prefLabel "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 prefLabel "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 P1476 Q58921472-32C17435-D964-456F-8E95-3F07990A7EBE @default.
- Q58921472 P2093 Q58921472-907C181E-B452-41FC-8EDC-34440710D149 @default.
- Q58921472 P2093 Q58921472-9DABB66A-8EFF-431C-A32E-F28AD1DC0C9C @default.
- Q58921472 P2093 Q58921472-BD51EA0C-81E4-4F78-A735-66C1BF149817 @default.
- Q58921472 P2093 Q58921472-C590EF34-F9E8-47C2-B792-D7F205F3A700 @default.
- Q58921472 P2093 Q58921472-D3E7D91C-BD0B-4DF3-B3BE-FE3F57B95537 @default.
- Q58921472 P2093 Q58921472-E1383B57-105D-4D21-9ED3-FBCA784B6702 @default.
- Q58921472 P31 Q58921472-68C15098-8362-4275-84A2-77BC581073E3 @default.
- Q58921472 P356 Q58921472-C2FFB687-ED53-468E-A7D0-33429C1504AB @default.
- Q58921472 P50 Q58921472-58D69533-E399-4F78-9A94-9AEF0D762783 @default.
- Q58921472 P577 Q58921472-71106A0B-5F0C-4104-8683-443AD07FDB40 @default.
- Q58921472 P356 12.395697 @default.
- Q58921472 P1476 "Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures" @default.
- Q58921472 P2093 "Carolyn D. White" @default.
- Q58921472 P2093 "Cristian A. Bolle" @default.
- Q58921472 P2093 "Flavio Pardo" @default.
- Q58921472 P2093 "Herbert R. Shea" @default.
- Q58921472 P2093 "Kimberly K. Cameron" @default.
- Q58921472 P2093 "Susanne Arney" @default.
- Q58921472 P31 Q13442814 @default.
- Q58921472 P356 "10.1117/12.395697" @default.
- Q58921472 P50 Q55127319 @default.
- Q58921472 P577 "2000-08-10T00:00:00Z" @default.