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- Q59004445 description "article scientifique publié en 1994" @default.
- Q59004445 description "wetenschappelijk artikel" @default.
- Q59004445 description "наукова стаття, опублікована в липні 1994" @default.
- Q59004445 name "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 name "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 type Item @default.
- Q59004445 label "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 label "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 prefLabel "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 prefLabel "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 P1433 Q59004445-AC27070B-B556-48FA-8AFB-DA32E85C3D21 @default.
- Q59004445 P1476 Q59004445-09505BAE-44DE-4A37-9341-517F75A0C474 @default.
- Q59004445 P2093 Q59004445-3974A63D-E5C5-4EFE-BC57-1F66077F74B4 @default.
- Q59004445 P304 Q59004445-290A6BAA-ECE8-4EA9-9A0C-FB8DFBFDA25F @default.
- Q59004445 P31 Q59004445-287EEFDC-17EC-46A8-A1DB-B772A9DC90C7 @default.
- Q59004445 P356 Q59004445-8A4DC0EF-3459-4345-ACDD-7E3EAA6BB925 @default.
- Q59004445 P433 Q59004445-5AAC2C1B-5A53-4C5D-BF29-DDCEBBBF6554 @default.
- Q59004445 P478 Q59004445-B062262D-617C-40F1-969D-BCC87914B2F4 @default.
- Q59004445 P50 Q59004445-82448268-3621-4398-BF28-B1D7D8197399 @default.
- Q59004445 P577 Q59004445-F74F4B49-7201-4663-9CCB-09C613A3C803 @default.
- Q59004445 P356 1.579319 @default.
- Q59004445 P1433 Q13739484 @default.
- Q59004445 P1476 "Characterization of etch‐induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source" @default.
- Q59004445 P2093 "K. T. Sung" @default.
- Q59004445 P304 "1346-1350" @default.
- Q59004445 P31 Q13442814 @default.
- Q59004445 P356 "10.1116/1.579319" @default.
- Q59004445 P433 "4" @default.
- Q59004445 P478 "12" @default.
- Q59004445 P50 Q38318229 @default.
- Q59004445 P577 "1994-07-01T00:00:00Z" @default.