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- Q59004487 description "article scientifique publié en 1994" @default.
- Q59004487 description "artículu científicu" @default.
- Q59004487 description "wetenschappelijk artikel" @default.
- Q59004487 description "наукова стаття, опублікована в січні 1994" @default.
- Q59004487 name "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 name "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 type Item @default.
- Q59004487 label "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 label "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 prefLabel "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 prefLabel "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 P1433 Q59004487-DDFA6EC1-3BE0-42FF-999B-BF97121DB9B8 @default.
- Q59004487 P1476 Q59004487-43153EAE-6351-495D-816D-E91693118580 @default.
- Q59004487 P2093 Q59004487-C1541776-4553-48AA-AFDC-DDAECFE46274 @default.
- Q59004487 P2093 Q59004487-C811CB37-056F-4B4B-85A1-170FA0AE4914 @default.
- Q59004487 P2093 Q59004487-DD640BFF-042A-437D-BB6E-C12956ED3DBD @default.
- Q59004487 P304 Q59004487-A771B84C-D26F-45A4-865E-AF9338B65C5D @default.
- Q59004487 P31 Q59004487-230190E1-975F-4770-B5A8-0672944ECDD9 @default.
- Q59004487 P356 Q59004487-8FE5409D-E026-4DC1-AC21-5CE1F371DA16 @default.
- Q59004487 P433 Q59004487-E9EBBF12-76BE-4233-BC92-3ECDDD2ACA86 @default.
- Q59004487 P478 Q59004487-99ECA64D-04F3-48FF-A414-1EBB3E689D57 @default.
- Q59004487 P50 Q59004487-674161B0-966C-4B22-9487-F13FED8C2DAA @default.
- Q59004487 P577 Q59004487-48C3E6C1-64A1-40B4-A6F8-F2E4E4ABCBC6 @default.
- Q59004487 P356 1.578860 @default.
- Q59004487 P1433 Q13739484 @default.
- Q59004487 P1476 "Dependence of etch characteristics on charge particles as measured by Langmuir probe in a multipolar electron cyclotron resonance source" @default.
- Q59004487 P2093 "K. T. Sung" @default.
- Q59004487 P2093 "M. Dahimene" @default.
- Q59004487 P2093 "W. H. Juan" @default.
- Q59004487 P304 "69-74" @default.
- Q59004487 P31 Q13442814 @default.
- Q59004487 P356 "10.1116/1.578860" @default.
- Q59004487 P433 "1" @default.
- Q59004487 P478 "12" @default.
- Q59004487 P50 Q38318229 @default.
- Q59004487 P577 "1994-01-01T00:00:00Z" @default.