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- Q59004720 description "article scientifique publié en 1993" @default.
- Q59004720 description "wetenschappelijk artikel" @default.
- Q59004720 description "наукова стаття, опублікована в липні 1993" @default.
- Q59004720 name "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 name "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 type Item @default.
- Q59004720 label "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 label "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 prefLabel "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 prefLabel "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 P1433 Q59004720-739AF2ED-2D2E-42FF-A572-15C003B2825A @default.
- Q59004720 P1476 Q59004720-CD88E658-1D75-4F10-A9DA-519BCB1E5C12 @default.
- Q59004720 P2093 Q59004720-CCEF39D1-0298-4347-994B-7BB052385A29 @default.
- Q59004720 P304 Q59004720-9293D612-D021-4D34-A8D8-16A28A526365 @default.
- Q59004720 P31 Q59004720-2EEF1C0F-6433-4585-8DEC-BC39C747C0EB @default.
- Q59004720 P356 Q59004720-C45397E0-6967-4181-8F1C-AE750B2E170A @default.
- Q59004720 P433 Q59004720-4D848854-EF23-4DB3-9BC5-BD71048F5410 @default.
- Q59004720 P478 Q59004720-24276F6D-F2E7-4124-8554-275AB2943C40 @default.
- Q59004720 P50 Q59004720-FDF62B34-D1D9-432D-8962-76D465F162E4 @default.
- Q59004720 P577 Q59004720-C6D2BF39-C56A-448B-B352-E70F94084468 @default.
- Q59004720 P8608 Q59004720-450EB899-C559-40D0-9CAD-94238D4A70D5 @default.
- Q59004720 P356 1.578494 @default.
- Q59004720 P1433 Q13739484 @default.
- Q59004720 P1476 "Etching of Si with Cl2 using an electron cyclotron resonance source" @default.
- Q59004720 P2093 "K. T. Sung" @default.
- Q59004720 P304 "1206-1210" @default.
- Q59004720 P31 Q13442814 @default.
- Q59004720 P356 "10.1116/1.578494" @default.
- Q59004720 P433 "4" @default.
- Q59004720 P478 "11" @default.
- Q59004720 P50 Q38318229 @default.
- Q59004720 P577 "1993-07-01T00:00:00Z" @default.
- Q59004720 P8608 "release_5ur6mgmvlzfbrmg537pfrymwha" @default.