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- Q59004815 description "article scientifique publié en 1992" @default.
- Q59004815 description "im Januar 1992 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59004815 description "wetenschappelijk artikel" @default.
- Q59004815 description "наукова стаття, опублікована в 1992" @default.
- Q59004815 name "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 name "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 type Item @default.
- Q59004815 label "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 label "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 prefLabel "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 prefLabel "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 P1433 Q59004815-97EBEBFD-4BEB-40D7-AA14-E41B19686D62 @default.
- Q59004815 P1476 Q59004815-94D008EF-3E21-4C0F-A3CE-9C069EB15D89 @default.
- Q59004815 P2093 Q59004815-5AA2CA51-95AD-4431-A2EC-6B3314B57810 @default.
- Q59004815 P304 Q59004815-B72F2AA6-30BD-496F-B34E-3DDEF7E35B39 @default.
- Q59004815 P31 Q59004815-1AE0F24B-E5F7-42C5-BEAB-1CC83E9CA670 @default.
- Q59004815 P356 Q59004815-722311F0-1BFA-4711-9CAF-D406DC53DA80 @default.
- Q59004815 P433 Q59004815-BCA8757B-8248-4BD7-BC2F-5BA956393E22 @default.
- Q59004815 P478 Q59004815-EC6C7837-B2C6-4660-A3EA-F826AF892C01 @default.
- Q59004815 P577 Q59004815-20FF27DF-287E-46AC-ADC6-E40B6E84D3D5 @default.
- Q59004815 P356 1.2069129 @default.
- Q59004815 P1433 Q3186957 @default.
- Q59004815 P1476 "Selective Etching of Bilayer Photoresist Using a Multipolar Electron Cyclotron Resonance Source" @default.
- Q59004815 P2093 "K. T. Sung" @default.
- Q59004815 P304 "3599" @default.
- Q59004815 P31 Q13442814 @default.
- Q59004815 P356 "10.1149/1.2069129" @default.
- Q59004815 P433 "12" @default.
- Q59004815 P478 "139" @default.
- Q59004815 P577 "1992-01-01T00:00:00Z" @default.