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- Q59005726 description "article published in 1983" @default.
- Q59005726 description "im Jahr 1983 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59005726 description "wetenschappelijk artikel" @default.
- Q59005726 description "наукова стаття, опублікована в 1983" @default.
- Q59005726 name "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 name "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 type Item @default.
- Q59005726 label "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 label "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 prefLabel "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 prefLabel "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 P1433 Q59005726-6DA468FD-C060-44FB-A326-DAC44B1254D6 @default.
- Q59005726 P1476 Q59005726-5A3A8E0A-72DB-4303-874C-E9FA9F598989 @default.
- Q59005726 P2093 Q59005726-864E4E7C-92DB-466F-B2AD-B0B5D1ED5DB3 @default.
- Q59005726 P304 Q59005726-E0FF6D9C-BF81-421F-87DB-DA48C541304D @default.
- Q59005726 P31 Q59005726-A6766CB3-C331-4D8D-B8BF-49C5F22E26D3 @default.
- Q59005726 P356 Q59005726-15377F8F-CE5D-4E4A-B4E8-C83ECEAEA9CF @default.
- Q59005726 P433 Q59005726-05A26EF3-48EB-463B-8E53-8529F48AC370 @default.
- Q59005726 P478 Q59005726-C38DF906-48BF-4AB1-8988-3B05DCB8FD9D @default.
- Q59005726 P577 Q59005726-7E0C29BF-219E-4AF3-84FC-1064557E2179 @default.
- Q59005726 P356 1.582671 @default.
- Q59005726 P1433 Q29043658 @default.
- Q59005726 P1476 "Large area ion beam assisted etching of GaAs with high etch rates and controlled anisotropy" @default.
- Q59005726 P2093 "G. A. Lincoln" @default.
- Q59005726 P304 "1043" @default.
- Q59005726 P31 Q13442814 @default.
- Q59005726 P356 "10.1116/1.582671" @default.
- Q59005726 P433 "4" @default.
- Q59005726 P478 "1" @default.
- Q59005726 P577 "1983-01-01T00:00:00Z" @default.