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- Q59167639 description "article scientifique publié en 2013" @default.
- Q59167639 description "wetenschappelijk artikel" @default.
- Q59167639 description "наукова стаття, опублікована в серпні 2013" @default.
- Q59167639 name "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 name "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 type Item @default.
- Q59167639 label "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 label "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 prefLabel "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 prefLabel "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 P1476 Q59167639-ED85BBEB-5773-49DB-89EB-DF8A0F9429CA @default.
- Q59167639 P2093 Q59167639-53C90C25-2050-4255-AEC7-F5B1BE32F3B4 @default.
- Q59167639 P2093 Q59167639-6B32C001-4497-4778-8E1C-9344356B668E @default.
- Q59167639 P31 Q59167639-850EF4E9-920A-4430-8D5B-455EEF593989 @default.
- Q59167639 P356 Q59167639-F1E555DC-7D6D-4A3B-A142-1906AB7BBCF2 @default.
- Q59167639 P577 Q59167639-49497416-3C5B-43AE-B222-9F829FF1B765 @default.
- Q59167639 P356 NANO.2013.6720850 @default.
- Q59167639 P1476 "Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors" @default.
- Q59167639 P2093 "Qingsong Xu" @default.
- Q59167639 P2093 "Yukun Jia" @default.
- Q59167639 P31 Q13442814 @default.
- Q59167639 P356 "10.1109/NANO.2013.6720850" @default.
- Q59167639 P577 "2013-08-01T00:00:00Z" @default.