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- Q59167684 description "article" @default.
- Q59167684 description "artículu científicu" @default.
- Q59167684 description "wetenschappelijk artikel" @default.
- Q59167684 description "наукова стаття, опублікована у 2010" @default.
- Q59167684 name "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 name "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 type Item @default.
- Q59167684 label "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 label "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 prefLabel "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 prefLabel "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 P1476 Q59167684-B6A97D94-6012-4327-B247-1D980F11F24F @default.
- Q59167684 P2093 Q59167684-BD54DB12-0360-4A60-BB7F-8C48A6924F18 @default.
- Q59167684 P2093 Q59167684-EC4FB4B5-0BC3-4FA1-861F-AD3888DE862C @default.
- Q59167684 P31 Q59167684-D4F6BDF4-283C-4A82-8642-EDB96C900C10 @default.
- Q59167684 P356 Q59167684-A666CB5C-B27F-4C50-8AAE-B1FAD763B6DD @default.
- Q59167684 P577 Q59167684-91D8C47E-209C-4B09-B40E-6FDEA871FDB1 @default.
- Q59167684 P356 IMECE2010-40893 @default.
- Q59167684 P1476 "System Identification and Vibration Control of a Piezo-Driven Flexure-Based XYZ Parallel Micropositioning Stage" @default.
- Q59167684 P2093 "Qingsong Xu" @default.
- Q59167684 P2093 "Yangmin Li" @default.
- Q59167684 P31 Q13442814 @default.
- Q59167684 P356 "10.1115/IMECE2010-40893" @default.
- Q59167684 P577 "2010-01-01T00:00:00Z" @default.