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- Q59260868 description "article scientifique publié en 2001" @default.
- Q59260868 description "im Januar 2001 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59260868 description "wetenschappelijk artikel" @default.
- Q59260868 description "наукова стаття, опублікована у 2001" @default.
- Q59260868 name "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
- Q59260868 name "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
- Q59260868 type Item @default.
- Q59260868 label "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
- Q59260868 label "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
- Q59260868 prefLabel "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
- Q59260868 prefLabel "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
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- Q59260868 P1476 Q59260868-B503DCB2-0E3D-4C1A-9292-6350D773AE81 @default.
- Q59260868 P2093 Q59260868-7502495D-74A4-46CC-93F7-9FC95B83228A @default.
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- Q59260868 P2093 Q59260868-FBBE29F2-7535-4C54-A420-E4DD203E48C3 @default.
- Q59260868 P2860 Q59260868-22943258-0203-4884-B7E1-77D8DAA0F04A @default.
- Q59260868 P304 Q59260868-9FDA0173-BC6D-4859-A3F5-DEDA08530A5F @default.
- Q59260868 P31 Q59260868-0E8D5572-385B-43CD-BD6A-969A011D05FE @default.
- Q59260868 P356 Q59260868-331DF18A-A57D-49F8-9D42-2E712B8916BF @default.
- Q59260868 P433 Q59260868-05113F0A-CCA9-4D87-A732-E6C504BDA571 @default.
- Q59260868 P478 Q59260868-DEDFF06A-9BDB-4BB9-960C-20831D212DBA @default.
- Q59260868 P577 Q59260868-C80204A5-91CA-494F-8197-8599B04CD50B @default.
- Q59260868 P356 1.1348264 @default.
- Q59260868 P1433 Q3186957 @default.
- Q59260868 P1476 "Surface Damage in Silicon Substrates after the SiCl[sub 4] Dry Etch of a Poly-Si Film" @default.
- Q59260868 P2093 "A. Castaldini" @default.
- Q59260868 P2093 "A. Cavallini" @default.
- Q59260868 P2093 "D. Cavalcoli" @default.
- Q59260868 P2093 "E. Susi" @default.
- Q59260868 P2860 Q59260901 @default.
- Q59260868 P304 "G150" @default.
- Q59260868 P31 Q13442814 @default.
- Q59260868 P356 "10.1149/1.1348264" @default.
- Q59260868 P433 "3" @default.
- Q59260868 P478 "148" @default.
- Q59260868 P577 "2001-01-01T00:00:00Z" @default.