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- Q59268781 description "article scientifique publié en 2007" @default.
- Q59268781 description "im Dezember 2007 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59268781 description "wetenschappelijk artikel" @default.
- Q59268781 description "наукова стаття, опублікована в грудні 2007" @default.
- Q59268781 name "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 name "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 type Item @default.
- Q59268781 label "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 label "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 prefLabel "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 prefLabel "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 P1433 Q59268781-C17631EF-88AB-4F9E-9EBF-C98A4396C55B @default.
- Q59268781 P1476 Q59268781-138EAE8E-10C2-48DF-823C-921294B0E9AA @default.
- Q59268781 P2093 Q59268781-1C9FE6BB-A752-4D2E-9B6C-4B9B2F76525F @default.
- Q59268781 P2093 Q59268781-49CA4E56-6FF3-47FF-8F37-5A62BBB1AE78 @default.
- Q59268781 P2093 Q59268781-50172E64-8CF8-47FE-97B5-43BED5F3652F @default.
- Q59268781 P2093 Q59268781-B1F029F5-D1FE-493B-BD9B-37C6A8BBF161 @default.
- Q59268781 P2093 Q59268781-E768EA14-5233-45F7-9B5D-355F37D5A579 @default.
- Q59268781 P2093 Q59268781-E98029BC-8C0E-406B-B71B-7B68862A31FD @default.
- Q59268781 P304 Q59268781-B3A006CA-5737-446F-9E8E-8BA6FEC81057 @default.
- Q59268781 P31 Q59268781-3AC394F9-D5C2-427B-93A2-C8A4F1856BEE @default.
- Q59268781 P356 Q59268781-12CCA35F-CF38-45D4-8E8D-44061DFB704A @default.
- Q59268781 P433 Q59268781-55578EE3-B528-44D0-BB0F-A79F2DD03F33 @default.
- Q59268781 P478 Q59268781-6539D074-D8B9-411D-B613-427565C1C389 @default.
- Q59268781 P577 Q59268781-CF5F6ECF-A600-4510-B76F-82EB875E8B8D @default.
- Q59268781 P356 J.ELECTACTA.2007.03.018 @default.
- Q59268781 P1433 Q3023662 @default.
- Q59268781 P1476 "Investigations on the corrosion of copper patterns in the course of the “post-CMP cleaning” of integrated electronic microcircuits in oxalic acid aqueous solutions" @default.
- Q59268781 P2093 "A. Pailleret" @default.
- Q59268781 P2093 "C. Gabrielli" @default.
- Q59268781 P2093 "C. Mace" @default.
- Q59268781 P2093 "E. Ostermann" @default.
- Q59268781 P2093 "M.C. Bernard" @default.
- Q59268781 P2093 "S. Joiret" @default.
- Q59268781 P304 "1325-1335" @default.
- Q59268781 P31 Q13442814 @default.
- Q59268781 P356 "10.1016/J.ELECTACTA.2007.03.018" @default.
- Q59268781 P433 "3" @default.
- Q59268781 P478 "53" @default.
- Q59268781 P577 "2007-12-01T00:00:00Z" @default.