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- Q59293180 description "article scientifique publié en 2013" @default.
- Q59293180 description "wetenschappelijk artikel" @default.
- Q59293180 description "наукова стаття, опублікована в листопаді 2013" @default.
- Q59293180 name "Scratch formation and its mechanism in chemical mechanical planarization (CMP)" @default.
- Q59293180 name "Scratch formation and its mechanism in chemical mechanical planarization" @default.
- Q59293180 type Item @default.
- Q59293180 label "Scratch formation and its mechanism in chemical mechanical planarization (CMP)" @default.
- Q59293180 label "Scratch formation and its mechanism in chemical mechanical planarization" @default.
- Q59293180 prefLabel "Scratch formation and its mechanism in chemical mechanical planarization (CMP)" @default.
- Q59293180 prefLabel "Scratch formation and its mechanism in chemical mechanical planarization" @default.
- Q59293180 P1433 Q59293180-BA4839CF-429E-4123-BCB7-4A6EA00752EA @default.
- Q59293180 P1476 Q59293180-63AA7059-2BAD-4CC8-8327-121C9D4F5655 @default.
- Q59293180 P2093 Q59293180-0DB3204B-0C93-42C7-854F-37E42A4FB792 @default.
- Q59293180 P2093 Q59293180-0F3A0268-888B-4052-AEB8-E603E6C38797 @default.
- Q59293180 P2093 Q59293180-C029DA26-A49F-4B32-A4D4-FC4B0EED1704 @default.
- Q59293180 P2888 Q59293180-34FB7170-B44F-40DE-A73F-C626863C8625 @default.
- Q59293180 P304 Q59293180-B9402906-BC4A-4D6B-B5D7-600B810FA4A0 @default.
- Q59293180 P31 Q59293180-6736DD8D-8B10-4C42-834B-4A73D8B0B1B9 @default.
- Q59293180 P356 Q59293180-F6E69664-4D7B-4C57-9981-ECC7CA2C7856 @default.
- Q59293180 P433 Q59293180-DA4DBE85-37C5-469C-971B-775C57AB4FFF @default.
- Q59293180 P478 Q59293180-D4D45F79-AAC6-46E5-9555-81657C67A2A1 @default.
- Q59293180 P577 Q59293180-1820F374-A70F-4468-B127-15363768C082 @default.
- Q59293180 P356 S40544-013-0026-Y @default.
- Q59293180 P1433 Q50810937 @default.
- Q59293180 P1476 "Scratch formation and its mechanism in chemical mechanical planarization (CMP)" @default.
- Q59293180 P2093 "Jin-Goo Park" @default.
- Q59293180 P2093 "Manivannan Ramachandran" @default.
- Q59293180 P2093 "Tae-Young Kwon" @default.
- Q59293180 P2888 s40544-013-0026-y @default.
- Q59293180 P304 "279-305" @default.
- Q59293180 P31 Q13442814 @default.
- Q59293180 P356 "10.1007/S40544-013-0026-Y" @default.
- Q59293180 P433 "4" @default.
- Q59293180 P478 "1" @default.
- Q59293180 P577 "2013-11-14T00:00:00Z" @default.