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- Q59372313 description "article scientifique publié en 2005" @default.
- Q59372313 description "im November 2005 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59372313 description "wetenschappelijk artikel" @default.
- Q59372313 description "наукова стаття, опублікована в листопаді 2005" @default.
- Q59372313 name "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 name "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 type Item @default.
- Q59372313 label "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 label "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 prefLabel "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 prefLabel "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 P1433 Q59372313-D1C417FE-6CF4-42E7-A3B5-DFD6C3EF0E81 @default.
- Q59372313 P1476 Q59372313-9F5F94C8-4F18-4B3E-85F3-1B7BD4031233 @default.
- Q59372313 P2093 Q59372313-112BAD29-D8AC-49BF-AD3A-CFDAC2B0EC81 @default.
- Q59372313 P2093 Q59372313-241A502D-46B2-4CEA-8FEF-CF2C2094FB3B @default.
- Q59372313 P2093 Q59372313-49D7851B-9A87-4ADD-9D28-C6242B0B47B1 @default.
- Q59372313 P2093 Q59372313-4DD35A2B-8534-40C1-B2D4-87E6C60E7344 @default.
- Q59372313 P2093 Q59372313-5DB3150E-643F-470F-A2C7-22B70C98B7BC @default.
- Q59372313 P2093 Q59372313-6F529024-3AEB-4279-9CA0-77E97E839F36 @default.
- Q59372313 P2093 Q59372313-71DCC0B2-8352-4217-B7F6-04E623CF89EA @default.
- Q59372313 P2093 Q59372313-80410124-CA89-4910-B025-D878D06AF3C5 @default.
- Q59372313 P2093 Q59372313-8D9DFDC1-E6CD-40B0-9B22-AF66A412E602 @default.
- Q59372313 P2093 Q59372313-C417FE3F-2D0C-4D1D-ADC6-2EDDD3A03E2F @default.
- Q59372313 P2093 Q59372313-F0B41F56-52D4-4CF8-8832-65647148895E @default.
- Q59372313 P2093 Q59372313-FB4EA3B4-108C-4C28-8C4D-B6FA4D6CA220 @default.
- Q59372313 P2888 Q59372313-259F56A0-847C-43F6-8A72-D7BF03502C34 @default.
- Q59372313 P304 Q59372313-36C27C3E-C708-4B92-9D7A-34006E52EEB8 @default.
- Q59372313 P31 Q59372313-D9233137-4363-4325-B687-7917DF373C67 @default.
- Q59372313 P356 Q59372313-D730DEBF-9879-4A9E-B1C1-B3875F38101A @default.
- Q59372313 P433 Q59372313-0DD0DD32-C138-492E-AB63-103E3F1CB104 @default.
- Q59372313 P478 Q59372313-417080E0-C58A-40E9-98FE-FAD4D6337EF7 @default.
- Q59372313 P577 Q59372313-72A548A6-F512-4A9E-9F4E-8AAA3439214C @default.
- Q59372313 P356 S00339-005-3313-2 @default.
- Q59372313 P1433 Q2864649 @default.
- Q59372313 P1476 "Issues on nanoimprint lithography with a single-layer resist structure" @default.
- Q59372313 P2093 "D.A.A. Ohlberg" @default.
- Q59372313 P2093 "D.L. Olynick" @default.
- Q59372313 P2093 "G.Y. Jung" @default.
- Q59372313 P2093 "H. Lee" @default.
- Q59372313 P2093 "M. Saif Islam" @default.
- Q59372313 P2093 "R.S. Williams" @default.
- Q59372313 P2093 "S. Ganapathiappan" @default.
- Q59372313 P2093 "S.Y. Wang" @default.
- Q59372313 P2093 "W. Wu" @default.
- Q59372313 P2093 "W.M. Tong" @default.
- Q59372313 P2093 "X. Li" @default.
- Q59372313 P2093 "Y. Chen" @default.
- Q59372313 P2888 s00339-005-3313-2 @default.
- Q59372313 P304 "1331-1335" @default.
- Q59372313 P31 Q13442814 @default.
- Q59372313 P356 "10.1007/S00339-005-3313-2" @default.
- Q59372313 P433 "7" @default.
- Q59372313 P478 "81" @default.
- Q59372313 P577 "2005-11-01T00:00:00Z" @default.