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- Q59443391 description "article scientifique publié en 2017" @default.
- Q59443391 description "wetenschappelijk artikel" @default.
- Q59443391 description "наукова стаття, опублікована в червні 2017" @default.
- Q59443391 name "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
- Q59443391 name "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
- Q59443391 type Item @default.
- Q59443391 label "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
- Q59443391 label "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
- Q59443391 prefLabel "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
- Q59443391 prefLabel "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
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- Q59443391 P304 Q59443391-A6CC97C6-EDC2-420C-AD5B-A1894D6E7A6C @default.
- Q59443391 P31 Q59443391-583FA0BA-149E-4AE4-968F-9F355664CDF4 @default.
- Q59443391 P356 Q59443391-546FB067-8988-4631-9C57-E0BD1D16B79C @default.
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- Q59443391 P478 Q59443391-72B860FD-A858-47C5-82A5-296B3AAAB441 @default.
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- Q59443391 P577 Q59443391-EB810A40-335A-4DDF-868D-4C60B14167E7 @default.
- Q59443391 P356 1.4036889 @default.
- Q59443391 P1476 "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry" @default.
- Q59443391 P2093 "Brian Bilenberg" @default.
- Q59443391 P2093 "Deepak Dwarakanath" @default.
- Q59443391 P2093 "Jan Friis Jørgensen" @default.
- Q59443391 P2093 "Jonas Skovlund Madsen" @default.
- Q59443391 P2093 "Morten Hannibal Madsen" @default.
- Q59443391 P2093 "Pierre Boher" @default.
- Q59443391 P2093 "Poul Erik Hansen" @default.
- Q59443391 P304 "031005" @default.
- Q59443391 P31 Q13442814 @default.
- Q59443391 P356 "10.1115/1.4036889" @default.
- Q59443391 P433 "3" @default.
- Q59443391 P478 "5" @default.
- Q59443391 P50 Q55089732 @default.
- Q59443391 P577 "2017-06-07T00:00:00Z" @default.