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- Q59443712 description "article scientifique publié en 2017" @default.
- Q59443712 description "wetenschappelijk artikel" @default.
- Q59443712 description "наукова стаття, опублікована у 2017" @default.
- Q59443712 name "MEMS/NEMS Devices and Applications" @default.
- Q59443712 name "MEMS/NEMS Devices and Applications" @default.
- Q59443712 type Item @default.
- Q59443712 label "MEMS/NEMS Devices and Applications" @default.
- Q59443712 label "MEMS/NEMS Devices and Applications" @default.
- Q59443712 prefLabel "MEMS/NEMS Devices and Applications" @default.
- Q59443712 prefLabel "MEMS/NEMS Devices and Applications" @default.
- Q59443712 P1476 Q59443712-9D1AF129-4BAB-43ED-998B-5DBCCADD86AD @default.
- Q59443712 P2093 Q59443712-24F44D16-7029-422F-BEFE-9EF34BF9186B @default.
- Q59443712 P2093 Q59443712-4566C79B-DE77-4182-9B42-247C1A33255E @default.
- Q59443712 P304 Q59443712-B0CB4289-0DBD-43F6-8697-975ABFBCE407 @default.
- Q59443712 P31 Q59443712-E8C2E527-5B8A-4212-8A13-1C18245D8BB7 @default.
- Q59443712 P356 Q59443712-4CA73E78-1A66-4B92-9B25-EFC6826E2329 @default.
- Q59443712 P50 Q59443712-00A56716-5E5B-4913-9670-3A9323B5C04C @default.
- Q59443712 P577 Q59443712-FFD162D5-BCCB-47E9-AB94-07766D969DE8 @default.
- Q59443712 P356 978-3-662-54357-3_13 @default.
- Q59443712 P1476 "MEMS/NEMS Devices and Applications" @default.
- Q59443712 P2093 "Christian A. Zorman" @default.
- Q59443712 P2093 "Darrin J. Young" @default.
- Q59443712 P304 "395-429" @default.
- Q59443712 P31 Q13442814 @default.
- Q59443712 P356 "10.1007/978-3-662-54357-3_13" @default.
- Q59443712 P50 Q41868384 @default.
- Q59443712 P577 "2017-01-01T00:00:00Z" @default.