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- Q59476701 description "article scientifique publié en 1993" @default.
- Q59476701 description "im März 1993 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59476701 description "wetenschappelijk artikel" @default.
- Q59476701 description "наукова стаття, опублікована в березні 1993" @default.
- Q59476701 name "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
- Q59476701 name "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
- Q59476701 type Item @default.
- Q59476701 label "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
- Q59476701 label "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
- Q59476701 prefLabel "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
- Q59476701 prefLabel "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
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- Q59476701 P577 Q59476701-D07560A9-8458-4039-97F0-E69A90FBE13D @default.
- Q59476701 P356 1.108767 @default.
- Q59476701 P1433 Q621615 @default.
- Q59476701 P1476 "Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells" @default.
- Q59476701 P2093 "B. Jacobs" @default.
- Q59476701 P2093 "J. Straka" @default.
- Q59476701 P2093 "T. Bickl" @default.
- Q59476701 P304 "1137-1139" @default.
- Q59476701 P31 Q13442814 @default.
- Q59476701 P356 "10.1063/1.108767" @default.
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- Q59476701 P433 "10" @default.
- Q59476701 P478 "62" @default.
- Q59476701 P50 Q1560869 @default.
- Q59476701 P577 "1993-03-08T00:00:00Z" @default.